2013
On sputtered particle distribution towards substrate during target erosion - simulation and experiment
KLEIN, Peter; Petr VAŠINA and Tereza SCHMIDTOVÁBasic information
Original name
On sputtered particle distribution towards substrate during target erosion - simulation and experiment
Authors
KLEIN, Peter (703 Slovakia, belonging to the institution); Petr VAŠINA (203 Czech Republic, guarantor, belonging to the institution) and Tereza SCHMIDTOVÁ (203 Czech Republic, belonging to the institution)
Edition
1st. Liberec, PAPN 2013: Book of extended abstracts, p. 26-29, 3 pp. 2013
Publisher
Technical University of Liberec
Other information
Language
English
Type of outcome
Proceedings paper
Field of Study
10305 Fluids and plasma physics
Country of publisher
Czech Republic
Confidentiality degree
is not subject to a state or trade secret
Publication form
storage medium (CD, DVD, flash disk)
RIV identification code
RIV/00216224:14310/13:00066337
Organization unit
Faculty of Science
ISBN
978-80-7372-988-2
Keywords (in Czech)
Naprašování; Magnetron; Simulácia Monte Carlo;
Keywords in English
Sputtering; Magnetron; Monte Carlo simulation; Compound material
Tags
Reviewed
Changed: 19/9/2013 11:05, Mgr. Peter Klein, Ph.D.
Abstract
In the original language
It is commonly observed that thin layers, especially formed by compound material deposited in planar magnetron using the same deposition manners, can have slightly different properties and composition. This research shows that one of the important factors to be considered thinking about fluxes of different species on the substrate is the target erosion state. Using Monte Carlo simulation optimal conditions for reproducibly depositing thin layer were calculated.
Links
| ED2.1.00/03.0086, research and development project |
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| GAP205/12/0407, research and development project |
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