Preparation of hard nc-TiC/a-C:H coatings using hybrid
PVD-PECVD process with rotating cylindrical magnetron

a 2013

Preparation of hard nc-TiC/a-C:H coatings using hybrid PVD-PECVD process with rotating cylindrical magnetron

ŽEMLIČKA, Radek, Mojmír JÍLEK, Petr VOGEL, Pavel SOUČEK, Vilma BURŠÍKOVÁ et. al.

Základní údaje

Originální název

Preparation of hard nc-TiC/a-C:H coatings using hybrid PVD-PECVD process with rotating cylindrical magnetron

Autoři

ŽEMLIČKA, Radek (203 Česká republika, domácí), Mojmír JÍLEK (203 Česká republika), Petr VOGEL (203 Česká republika), Pavel SOUČEK (203 Česká republika, domácí), Vilma BURŠÍKOVÁ (203 Česká republika, domácí) a Petr VAŠINA (203 Česká republika, garant, domácí)

Vydání

EMRS 2013 Spring Meeting, 2013

Další údaje

Jazyk

angličtina

Typ výsledku

Konferenční abstrakt

Obor

10305 Fluids and plasma physics

Stát vydavatele

Francie

Utajení

není předmětem státního či obchodního tajemství

Kód RIV

RIV/00216224:14310/13:00066346

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

magnetron sputtering; nanocomposites; TiC

Změněno: 20. 9. 2013 09:29, doc. Mgr. Pavel Souček, Ph.D.

Anotace

V originále

Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanocrystallites embedded in amorphous carbon matrix (nc-TiC/a-C:H coating), were deposited by sputtering of a rotating cylindrical titanium sputtering target in argon/acetylene gas mixture on high speed steel and tungsten carbide substrates which were placed on a DC biasable holder performing complex rotation around the Ti cathode. nc-TiC/a-C:H coatings with varying chemical composition prepared at 10 kW DC power (320 C), 20 kW (450 C) and 30 kW (450 C) and bias of -100 V reached maximal hardness of 24 GPa, 37 GPa and 28 GPa respectively. Because it could be expected that the optimal composition of the coating leading to maximal hardness should be reached independently on the applied power a process study was performed. Ti/Ar line intensity and discharge voltage showed sudden drop at the conditions where the maximal hardness was reached. EDX analyses show also sudden drop in Ti atomic concentration at this moment. The maximal hardness of a coating was reached always at conditions preceding the sudden drop which could be used for setting optimal deposition parameters to produce hard, well adherent and thick enough TiC/C coatings with low internal stress using industrially attractive concept of rotating cylindrical magnetron.

Návaznosti

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GAP205/12/0407, projekt VaV

Název: Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Investor: Grantová agentura ČR, Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Citovat

ŽEMLIČKA, Radek, Mojmír JÍLEK, Petr VOGEL, Pavel SOUČEK, Vilma BURŠÍKOVÁ a Petr VAŠINA. Preparation of hard nc-TiC/a-C:H coatings using hybrid PVD-PECVD process with rotating cylindrical magnetron. In EMRS 2013 Spring Meeting. 2013.

@proceedings{1122837,
   author = {Žemlička, Radek and Jílek, Mojmír and Vogel, Petr and Souček, Pavel and Buršíková, Vilma and Vašina, Petr},
   booktitle = {EMRS 2013 Spring Meeting},
   keywords = {magnetron sputtering; nanocomposites; TiC},
   language = {eng},
   title = {Preparation of hard nc-TiC/a-C:H coatings using hybrid PVD-PECVD process with rotating cylindrical magnetron},
   year = {2013}
}

TY  - CONF
ID  - 1122837
AU  - Žemlička, Radek - Jílek, Mojmír - Vogel, Petr - Souček, Pavel - Buršíková, Vilma - Vašina, Petr
PY  - 2013
TI  - Preparation of hard nc-TiC/a-C:H coatings using hybrid PVD-PECVD process with rotating cylindrical magnetron
KW  - magnetron sputtering
KW  - nanocomposites
KW  - TiC
N2  - Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanocrystallites embedded in amorphous carbon matrix (nc-TiC/a-C:H coating), were deposited by sputtering of a rotating cylindrical titanium sputtering target in argon/acetylene gas mixture on high speed steel and tungsten carbide substrates which were placed on a DC biasable holder performing complex rotation around the Ti cathode. nc-TiC/a-C:H coatings with varying chemical composition prepared at 10 kW DC power (320 C), 20 kW (450 C) and 30 kW (450 C) and bias of -100 V reached maximal hardness of 24 GPa, 37 GPa and 28 GPa respectively. Because it could be expected that the optimal composition of the coating leading to maximal hardness should be reached independently on the applied power a process study was performed. Ti/Ar line intensity and discharge voltage showed sudden drop at the conditions where the maximal hardness was reached. EDX analyses show also sudden drop in Ti atomic concentration at this moment. The maximal hardness of a coating was reached always at conditions preceding the sudden drop which could be used for setting optimal deposition parameters to produce hard, well adherent and thick enough TiC/C coatings with low internal stress using industrially attractive concept of rotating cylindrical magnetron.
ER  -

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