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@proceedings{1122838,
author = {Souček, Pavel and Schmidtová, Tereza and Zábranský, Lukáš and Buršíková, Vilma and Vašina, Petr and Caha, Ondřej and Buršík, Jiří and Peřina, Vratislav and Pei, Yutao and De Hosson, J.Th.M.},
booktitle = {EMRS 2013 Spring Meeting},
keywords = {magnetron sputtering; nanocomposites; TiC},
language = {eng},
title = {Comparison of nc-TiC/a-C:H nanocomposite coatings deposited by DC magnetron sputtering at low and high flux of impinging ions},
year = {2013}
}
TY - CONF
ID - 1122838
AU - Souček, Pavel - Schmidtová, Tereza - Zábranský, Lukáš - Buršíková, Vilma - Vašina, Petr - Caha, Ondřej - Buršík, Jiří - Peřina, Vratislav - Pei, Yutao - De Hosson, J.Th.M.
PY - 2013
TI - Comparison of nc-TiC/a-C:H nanocomposite coatings deposited by DC magnetron sputtering at low and high flux of impinging ions
KW - magnetron sputtering
KW - nanocomposites
KW - TiC
N2 - Nanocrystalline titanium carbide embedded in an amorphous (hydrogenated) carbon matrix, is a versatile nanocomposite material combining properties of hard titanium carbide grains and a soft carbon matrix. Depending on the content of the TiC phase and a-C(:H) phase the properties can be tailored from very hard films with hardness reaching over 40 GPa and Young’s modulus higher than 300 GPa respectively to low friction films with friction coefficient around 0.1 and low wear rate. Magnetron sputtering of titanium target in acetylene containing atmosphere is the most used method of nc-TiC/a-C(:H) coatings preparation. In this research, role of energetic ion bombardment on the coating quality was studied in details. A well-balanced magnetic field configuration leading to saturated ion current on the substrate of ~0.3 mA/cm2 and strongly unbalanced magnetic field ~2 mA/cm2 was used. Structure, mechanical and tribological properties of the resulting 4-6 micrometers thick well adherent coatings deposited on high speed steel and cemented tungsten carbide substrates was analyzed and compared. The structure, mechanical and tribological parameters were found to be strongly dependent on the chemical composition of the rating, though nearly independent on the impinging ion flux on the substrate
ER -
SOUČEK, Pavel, Tereza SCHMIDTOVÁ, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Petr VAŠINA, Ondřej CAHA, Jiří BURŠÍK, Vratislav PEŘINA, Yutao PEI a J.Th.M. DE HOSSON. Comparison of nc-TiC/a-C:H nanocomposite coatings deposited by DC magnetron sputtering at low and high flux of impinging ions. In \textit{EMRS 2013 Spring Meeting}. 2013.
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