TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid
PVD-PECVD Process with Rotating Cylindrical Magnetron

a 2013

TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron

VAŠINA, Petr, Radek ŽEMLIČKA, Vilma BURŠÍKOVÁ, Pavel SOUČEK, Petr VOGEL et. al.

Základní údaje

Originální název

TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron

Autoři

VAŠINA, Petr (203 Česká republika, garant, domácí), Radek ŽEMLIČKA (203 Česká republika, domácí), Vilma BURŠÍKOVÁ (203 Česká republika, domácí), Pavel SOUČEK (203 Česká republika, domácí), Petr VOGEL (203 Česká republika) a Mojmír JÍLEK (203 Česká republika)

Vydání

IVC-19/ICSS-15 and ICN+T 2013, 2013

Další údaje

Jazyk

angličtina

Typ výsledku

Konferenční abstrakt

Obor

10305 Fluids and plasma physics

Stát vydavatele

Francie

Utajení

není předmětem státního či obchodního tajemství

Kód RIV

RIV/00216224:14310/13:00066348

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

magnetron sputtering; TiC; cylindrical magnetron

Změněno: 20. 9. 2013 10:29, doc. Mgr. Pavel Souček, Ph.D.

Anotace

V originále

Hybrid PVD-PECVD process of titanium sputtering in a mixture of argon and acetylene combines aspects of both conventional techniques: sputtering of a rotating cylindrical titanium sputtering target (target size: 110 x 510 mm) by DC power and deposition from plasma activated acetylene which acts as a source of carbon for polymerization (PECVD). Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanocrystallites embedded in amorphous carbon matrix (nc-TiC/a-C:H coating), were deposited on high speed steel and tungsten carbide cermet substrates which were placed on a DC biasable holder performing complex rotation around the Ti cathode. nc-TiC/a-C:H coatings with varying chemical composition prepared at 10 kW DC power (320 C), 20 kW (450 C) and 30 kW (450 C) and bias of -100 V reached maximal hardness of 24 GPa, 37 GPa and 28 GPa respectively. Because it could be expected that the optimal composition of the coating leading to maximal hardness should be reached independently on the applied power a process study was performed. Ti/Ar line intensity and discharge voltage showed sudden drop at the conditions where the maximal hardness was reached. EDX analyses show also sudden drop in Ti atomic concentration at this moment.

Návaznosti

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GAP205/12/0407, projekt VaV

Název: Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Investor: Grantová agentura ČR, Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Citovat

VAŠINA, Petr, Radek ŽEMLIČKA, Vilma BURŠÍKOVÁ, Pavel SOUČEK, Petr VOGEL a Mojmír JÍLEK. TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron. In IVC-19/ICSS-15 and ICN+T 2013. 2013.

@proceedings{1122846,
   author = {Vašina, Petr and Žemlička, Radek and Buršíková, Vilma and Souček, Pavel and Vogel, Petr and Jílek, Mojmír},
   booktitle = {IVC-19/ICSS-15 and ICN+T 2013},
   keywords = {magnetron sputtering; TiC; cylindrical magnetron},
   language = {eng},
   title = {TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron},
   year = {2013}
}

TY  - CONF
ID  - 1122846
AU  - Vašina, Petr - Žemlička, Radek - Buršíková, Vilma - Souček, Pavel - Vogel, Petr - Jílek, Mojmír
PY  - 2013
TI  - TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron
KW  - magnetron sputtering
KW  - TiC
KW  - cylindrical magnetron
N2  - Hybrid PVD-PECVD process of titanium sputtering in a mixture of argon and acetylene combines aspects of both conventional techniques: sputtering of a rotating cylindrical titanium sputtering target (target size: 110 x 510 mm) by DC power and deposition from plasma activated acetylene which acts as a source of carbon for polymerization (PECVD). Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanocrystallites embedded in amorphous carbon matrix (nc-TiC/a-C:H coating), were deposited on high speed steel and tungsten carbide cermet substrates which were placed on a DC biasable holder performing complex rotation around the Ti cathode. nc-TiC/a-C:H coatings with varying chemical composition prepared at 10 kW DC power (320 C), 20 kW (450 C) and 30 kW (450 C) and bias of -100 V reached maximal hardness of 24 GPa, 37 GPa and 28 GPa respectively. Because it could be expected that the optimal composition of the coating leading to maximal hardness should be reached independently on the applied power a process study was performed. Ti/Ar line intensity and discharge voltage showed sudden drop at the conditions where the maximal hardness was reached. EDX analyses show also sudden drop in Ti atomic concentration at this moment.
ER  -

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