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@proceedings{1122857, author = {Vašina, Petr and Schmidtová, Tereza and Souček, Pavel and Buršíková, Vilma}, booktitle = {5th CESPC}, keywords = {magnetron sputtering; hybrid PVD-PECVD}, language = {eng}, isbn = {978-615-5270-04-8}, title = {Hybrid PVD-PECVD Process and Its Applications for Carbon Rich Nanocomposite Thin Film Deposition}, year = {2013} }
TY - CONF ID - 1122857 AU - Vašina, Petr - Schmidtová, Tereza - Souček, Pavel - Buršíková, Vilma PY - 2013 TI - Hybrid PVD-PECVD Process and Its Applications for Carbon Rich Nanocomposite Thin Film Deposition SN - 9786155270048 KW - magnetron sputtering KW - hybrid PVD-PECVD N2 - This contibution deals with study of hybrid PVD-PECVD process and its applications for carbon rich nanocomposite thin film deposition ER -
VAŠINA, Petr, Tereza SCHMIDTOVÁ, Pavel SOUČEK a Vilma BURŠÍKOVÁ. Hybrid PVD-PECVD Process and Its Applications for Carbon Rich Nanocomposite Thin Film Deposition. In \textit{5th CESPC}. 2013. ISBN~978-615-5270-04-8.
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