| FRANTA, Daniel, David NEČAS, Lenka ZAJÍČKOVÁ, Ivan OHLÍDAL a Jiří STUCHLÍK. Advanced modeling for optical characterization of amorphous hydrogenated silicon films. Thin Solid Films. Lausanne: Elsevier Science, 2013, roč. 541, Aug, s. 12-16. ISSN 0040-6090. Dostupné z: https://dx.doi.org/10.1016/j.tsf.2013.04.129. |
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@article{1161986,
author = {Franta, Daniel and Nečas, David and Zajíčková, Lenka and Ohlídal, Ivan and Stuchlík, Jiří},
article_location = {Lausanne},
article_number = {Aug},
doi = {http://dx.doi.org/10.1016/j.tsf.2013.04.129},
keywords = {Ellipsometry; Spectrophotometry; a-Si:H; Urbach tail; Localized states; Sum rule},
language = {eng},
issn = {0040-6090},
journal = {Thin Solid Films},
title = {Advanced modeling for optical characterization of amorphous hydrogenated silicon films},
url = {http://dx.doi.org/10.1016/j.tsf.2013.04.129},
volume = {541},
year = {2013}
}
TY - JOUR
ID - 1161986
AU - Franta, Daniel - Nečas, David - Zajíčková, Lenka - Ohlídal, Ivan - Stuchlík, Jiří
PY - 2013
TI - Advanced modeling for optical characterization of amorphous hydrogenated silicon films
JF - Thin Solid Films
VL - 541
IS - Aug
SP - 12-16
EP - 12-16
PB - Elsevier Science
SN - 00406090
KW - Ellipsometry
KW - Spectrophotometry
KW - a-Si:H
KW - Urbach tail
KW - Localized states
KW - Sum rule
UR - http://dx.doi.org/10.1016/j.tsf.2013.04.129
L2 - http://dx.doi.org/10.1016/j.tsf.2013.04.129
N2 - Amorphous hydrogenated silicon (a-Si:H) films deposited on glass and crystalline silicon substrates are analyzed using a multi-sample method combining ellipsometry and spectrophotometry in a spectral range of 0.046–8.9 eV, utilizing an analytical dispersion model based on parametrization of joint density of states and application of sum rule. This model includes all absorption processes from phonon absorption to core electron excitations. It is shown that if films deposited on both substrates are characterized together it is possible to study both phonon absorption and weak absorption processes below the band gap, i.e. the Urbach tail and absorption on localized states.
ER -
FRANTA, Daniel, David NEČAS, Lenka ZAJÍČKOVÁ, Ivan OHLÍDAL a Jiří STUCHLÍK. Advanced modeling for optical characterization of amorphous hydrogenated silicon films. \textit{Thin Solid Films}. Lausanne: Elsevier Science, 2013, roč.~541, Aug, s.~12-16. ISSN~0040-6090. Dostupné z: https://dx.doi.org/10.1016/j.tsf.2013.04.129.
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