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@proceedings{1193702,
author = {Dosoudilová, Lenka and Šperka, Jiří and Schäfer, Jan and Harhausen, Jens and Peters, Sebastian and Navrátil, Zdeněk and Foest, Rüdiger},
booktitle = {The XXII Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG) 2014},
keywords = {jet; neon; argon; mixtures; atmospheric pressure; optical diagnostic},
language = {eng},
isbn = {2-914771-86-X},
title = {Optical emission spectroscopy of RF plasma jet in neon/argon Penning mixture at atmospheric pressure},
year = {2014}
}
TY - CONF
ID - 1193702
AU - Dosoudilová, Lenka - Šperka, Jiří - Schäfer, Jan - Harhausen, Jens - Peters, Sebastian - Navrátil, Zdeněk - Foest, Rüdiger
PY - 2014
TI - Optical emission spectroscopy of RF plasma jet in neon/argon Penning mixture at atmospheric pressure
SN - 291477186X
KW - jet
KW - neon
KW - argon
KW - mixtures
KW - atmospheric pressure
KW - optical diagnostic
N2 - A radio-frequency (RF, 27.12 MHz) capillary atmospheric pressure plasma jet in neon/argon Penning gas mixture (0 % - 3 % admixture of argon) was investigated by optical emission spectroscopy. The miniaturized plasma jets have been found advantageous in a materials processing applications such as surface cleaning, surface activation, film deposition and sterilisation. One of the main advantages of these plasma sources is the possibility of localized and 3D treatment. In this work, the emission spectra were recorded in order to obtain information about the effect of quenching of neon excited atoms by argon with the increase of argon admixture. Further, the BOLSIG+ solver was used to calculate the electron mean energy and the rate coefficients for direct excitation of neon and argon levels for different Ne/Ar gas mixtures. The estimate of the reduced electric field strength according to these results was made.
ER -
DOSOUDILOVÁ, Lenka, Jiří ŠPERKA, Jan SCHÄFER, Jens HARHAUSEN, Sebastian PETERS, Zdeněk NAVRÁTIL a Rüdiger FOEST. Optical emission spectroscopy of RF plasma jet in neon/argon Penning mixture at atmospheric pressure. In \textit{The XXII Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG) 2014}. 2014. ISBN~2-914771-86-X.
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