On periodic oscillations observed on cathode voltage and
discharge current during HIPIMS process

a 2014

On periodic oscillations observed on cathode voltage and discharge current during HIPIMS process

KLEIN, Peter, Jaroslav HNILICA a Petr VAŠINA

Základní údaje

Originální název

On periodic oscillations observed on cathode voltage and discharge current during HIPIMS process

Autoři

KLEIN, Peter (703 Slovensko, domácí), Jaroslav HNILICA (203 Česká republika, domácí) a Petr VAŠINA (203 Česká republika, garant, domácí)

Vydání

Fifth International Conference on HIPIMS, 2014

Další údaje

Jazyk

angličtina

Typ výsledku

Konferenční abstrakt

Obor

10305 Fluids and plasma physics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Kód RIV

RIV/00216224:14310/14:00074183

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

HIPIMS; oscillations; cathode voltage; discharge current

Příznaky

Mezinárodní význam

Změněno: 12. 12. 2014 13:14, doc. Mgr. Jaroslav Hnilica, Ph.D.

Anotace

V originále

HiPIMS is promising technique for depositing thin layers. Instabilities accompanying HiPIMS also known as spokes were firstly observed independently by Anders et al and Kozyrev et al. Since then, OES and Langmuir probes are usually used for spoke diagnostics. In our research, periodic oscillations were not only observed on OES, but also on cathode voltage and discharge current. Alcatel SCM 650 sputtering system equipped with 20 cm titanium target and balanced magnetic field configuration was employed. Melec SIPP 2000 HiPIMS generator with maximum allowed voltage of 1000 V and maximum allowed current of 500 A was used. The generator was operated in constant voltage mode; discharge duration was 200 us with repetition frequency of 50 Hz. When the discharge current overreached typically 250 A, the periodic oscillations of discharge current and cathode voltage with frequency around 350 kHz were observed. Amplitude of the current oscillations was around 25 A, amplitude of the voltage oscillations was around 400 V. Varying discharge voltage different current time evolutions were obtained. However, the actual frequency of oscillations depended always on actual discharge current. This behavior is in contrary with behavior observed by Winter et al. With the increasing pressure the frequency of oscillations also increases. This result agrees with observations of Ehiasarian et al. Aforementioned results lead us to conclusion that observed oscillations of electrical quantities are another, yet not described manifests of the spoke phenomenon.

Návaznosti

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GAP205/12/0407, projekt VaV

Název: Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Investor: Grantová agentura ČR, Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Citovat

KLEIN, Peter, Jaroslav HNILICA a Petr VAŠINA. On periodic oscillations observed on cathode voltage and discharge current during HIPIMS process. In Fifth International Conference on HIPIMS. 2014.

@proceedings{1212704,
   author = {Klein, Peter and Hnilica, Jaroslav and Vašina, Petr},
   booktitle = {Fifth International Conference on HIPIMS},
   keywords = {HIPIMS; oscillations; cathode voltage; discharge current},
   language = {eng},
   title = {On periodic oscillations observed on cathode voltage and discharge current during HIPIMS process},
   year = {2014}
}

TY  - CONF
ID  - 1212704
AU  - Klein, Peter - Hnilica, Jaroslav - Vašina, Petr
PY  - 2014
TI  - On periodic oscillations observed on cathode voltage and discharge current during HIPIMS process
KW  - HIPIMS
KW  - oscillations
KW  - cathode voltage
KW  - discharge current
N2  - HiPIMS is promising technique for depositing thin layers. Instabilities accompanying HiPIMS also known as spokes were firstly observed independently by Anders et al and Kozyrev et al. Since then, OES and Langmuir probes are usually used for spoke diagnostics. In our research, periodic oscillations were not only observed on OES, but also on cathode voltage and discharge current. Alcatel SCM 650 sputtering system equipped with 20 cm titanium target and balanced magnetic field configuration was employed. Melec SIPP 2000 HiPIMS generator with maximum allowed voltage of 1000 V and maximum allowed current of 500 A was used. The generator was operated in constant voltage mode; discharge duration was 200 us with repetition frequency of 50 Hz. When the discharge current overreached typically 250 A, the periodic oscillations of discharge current and cathode voltage with frequency around 350 kHz were observed. Amplitude of the current oscillations was around 25 A, amplitude of the voltage oscillations was around 400 V. Varying discharge voltage different current time evolutions were obtained. However, the actual frequency of oscillations depended always on actual discharge current. This behavior is in contrary with behavior observed by Winter et al. With the increasing pressure the frequency of oscillations also increases. This result agrees with observations of Ehiasarian et al. Aforementioned results lead us to conclusion that observed oscillations of electrical quantities are another, yet not described manifests of the spoke phenomenon.
ER  -

KLEIN, Peter, Jaroslav HNILICA a Petr VAŠINA. On periodic oscillations observed on cathode voltage and discharge current during HIPIMS process. In \textit{Fifth International Conference on HIPIMS}. 2014.

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