| ŽEMLIČKA, Radek, Mojmír JÍLEK, Petr VOGL, Pavel SOUČEK, Vilma BURŠÍKOVÁ, Jiří BURŠÍK a Petr VAŠINA. Understanding of hybrid PVD–PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron. Surface & Coatings Technology. Elsevier Science, 2014, roč. 255, September, s. 118-123. ISSN 0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2014.02.069. |
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@article{1212723,
author = {Žemlička, Radek and Jílek, Mojmír and Vogl, Petr and Souček, Pavel and Buršíková, Vilma and Buršík, Jiří and Vašina, Petr},
article_number = {September},
doi = {http://dx.doi.org/10.1016/j.surfcoat.2014.02.069},
keywords = {Nanocomposite; Magnetron sputtering; Process control; Mechanical properties; Titanium–carbon; Industrial process},
language = {eng},
issn = {0257-8972},
journal = {Surface & Coatings Technology},
title = {Understanding of hybrid PVD–PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron},
volume = {255},
year = {2014}
}
TY - JOUR
ID - 1212723
AU - Žemlička, Radek - Jílek, Mojmír - Vogl, Petr - Souček, Pavel - Buršíková, Vilma - Buršík, Jiří - Vašina, Petr
PY - 2014
TI - Understanding of hybrid PVD–PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron
JF - Surface & Coatings Technology
VL - 255
IS - September
SP - 118-123
EP - 118-123
PB - Elsevier Science
SN - 02578972
KW - Nanocomposite
KW - Magnetron sputtering
KW - Process control
KW - Mechanical properties
KW - Titanium–carbon
KW - Industrial process
N2 - Titanium–carbon hard coatings were deposited by sputtering using a rotating cylindrical titanium target in an argon/acetylene gas mixture on cemented tungsten-carbide substrates which were placed on a DC-biasable holder to performa complex rotation around the central rotating cylindrical Ti cathode.While the optimal deposition process parameters to growthe coating of the highest possible hardness and lowfriction coefficientwere sought, the plasma parameters were monitored and correlated with the properties of the deposited coatings. The Ti/Ar line intensity and the cathode voltage exhibited a sudden drop at the conditions forwhich themaximal hardness was reached. EDX analyses also showed a sudden drop in the atomic concentration of titanium and a sudden increase in that of carbon at the same moment. The maximal hardness of the coating was always achieved at the conditions that preceded these sudden changes, so this phenomenon was used to set the optimal deposition parameters to produce hard,well-adherent and sufficiently thick titanium–carbon coatings using the industrially attractive concept of a rotating cylindrical magnetron.
ER -
ŽEMLIČKA, Radek, Mojmír JÍLEK, Petr VOGL, Pavel SOUČEK, Vilma BURŠÍKOVÁ, Jiří BURŠÍK a Petr VAŠINA. Understanding of hybrid PVD–PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron. \textit{Surface \&{} Coatings Technology}. Elsevier Science, 2014, roč.~255, September, s.~118-123. ISSN~0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2014.02.069.
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