2011
Diamond-Like Carbon (DLC) chemical vapor deposition technology: Characterization of DLC nano-layers and artificial neural networks for process modelling
AMATO, Filippo, Vilma BURŠÍKOVÁ, Jan JANČA, Eladia Maria PEÑA-MÉNDEZ, Josef HAVEL et. al.Základní údaje
Originální název
Diamond-Like Carbon (DLC) chemical vapor deposition technology: Characterization of DLC nano-layers and artificial neural networks for process modelling
Autoři
AMATO, Filippo (380 Itálie, domácí), Vilma BURŠÍKOVÁ (203 Česká republika, domácí), Jan JANČA (203 Česká republika, domácí), Eladia Maria PEÑA-MÉNDEZ (724 Španělsko) a Josef HAVEL (203 Česká republika, garant, domácí)
Vydání
TNT2011, 2011
Další údaje
Jazyk
angličtina
Typ výsledku
Prezentace na konferencích
Obor
10406 Analytical chemistry
Stát vydavatele
Španělsko
Utajení
není předmětem státního či obchodního tajemství
Kód RIV
RIV/00216224:14310/11:00078234
Organizační jednotka
Přírodovědecká fakulta
Klíčová slova česky
diamod-like carbon; nano-layers; artificial neural networks
Klíčová slova anglicky
diamod-like carbon; nano-layers; artificial neural networks
Příznaky
Mezinárodní význam, Recenzováno
Změněno: 28. 4. 2015 09:30, Ing. Andrea Mikešková
Anotace
V originále
Diamond-like carbon (DLC) is obtained cooling or quenching high energy precursive carbons on relatively cold surfaces. This deposition process can be performed by several methods as, for instance, by pulsed laser ablation, cathodic arc, ion beam or plasma enhanced chemical vapour deposition (PECVD). The speed of the deposition process does not allow the material to grow in the cubic crystalline geometry form as for the synthetic diamond production process. Therefore, the resulting DLC film has no long-range crystalline order. This characteristic allows obtaining flexible coatings with mechanical properties similar to that of diamond. The DLC-coating technology is nowadays widely used in medicine (brachytherapy, coating of blood-contacting surfaces etc.) [1,2,3], informatics (as protective material for hard-drives), tribology to prevent wear, solar cells technology [4] and in industry [5]. The properties of the final coating can be modified by doping DLC with elements such as nitrogen, silicon and oxygen, fluorine or metal atoms [6, 7]. Nitrogen incorporation has been used to improve field emission properties of DLC films [8]. One particular class of modified DLC coatings is that of diamond-like nano-composite films consisting of two amorphous interpenetrating networks, a diamond-like network and a silicon-oxide like network. nano-composite DLC films with SiOx content exhibit enhanced fracture toughness, high surface hardness, low compressive stress and high thermo mechanical stability [9, 10 ].
Návaznosti
| ED2.1.00/03.0086, projekt VaV |
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| MSM0021622411, záměr |
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