Studying a low-pressure microwave coaxial discharge in hydrogen
using a mixed 2D/3D fluid model

J 2015

Studying a low-pressure microwave coaxial discharge in hydrogen using a mixed 2D/3D fluid model

OBRUSNÍK, Adam a Zdeněk BONAVENTURA

Základní údaje

Originální název

Studying a low-pressure microwave coaxial discharge in hydrogen using a mixed 2D/3D fluid model

Autoři

OBRUSNÍK, Adam (203 Česká republika, domácí) a Zdeněk BONAVENTURA (203 Česká republika, garant, domácí)

Vydání

Journal of physics D: Applied physics, Bristol, England, IOP Publishing Ltd. 2015, 0022-3727

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 2.772

Kód RIV

RIV/00216224:14310/15:00080658

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1088/0022-3727/48/6/065201

UT WoS

000348842600006

Klíčová slova anglicky

microwave plasma; hydrogen; low-pressure; fluid model; coaxial discharge; plasmaline; nanocrystalline diamond

Štítky

AKR, podil, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 12. 4. 2016 13:32, Ing. Andrea Mikešková

Anotace

V originále

This work presents a numerical model of hydrogen plasma in a microwave coaxial discharge at low pressure (25–250 Pa). The model is a mixed two-dimensional (2D)/three-dimensional (3D) model in that it combines three-dimensional geometry for the electromagnetic field and two-dimensional geometry for the transport equations. The model is validated against experimental results available in the literature and, where possible, simulations of comparable discharges. The model shows reasonable agreement in the relevant pressure range. A parametric study with respect to pressure is carried out and it is observed that the plasma contracts towards the quartz tube with increasing pressure. Increasing the pressure also influences the abundance of H + ions but on the other hand it has little impact on hydrogen dissociation degree and electron temperature. Furthermore, the uniformity of the plasma above the substrate holder is analyzed. It is observed that at pressures over 150 Pa, the plasma gets non-uniform in the direction parallel to the plasma lines. Finally, the uniformity of particle and energy fluxes to the substrate holder are analyzed. Knowing the fluxes is especially useful for the material applications of the device.

Návaznosti

GAP205/12/0908, projekt VaV

Název: Pokročilý experimentální výzkum mikrovlnného plazmového systému pro přípravu velkoplošných nanodiamantových vrstev

Investor: Grantová agentura ČR, Pokročilý experimentální výzkum mikrovlnného plazmového systému pro přípravu velkoplošných nanodiamantových vrstev

Přiložené soubory

ZVV_2015_1219388_Studying_a_low_pressure.pdf

Požádat o autorskou verzi souboru

Citovat

OBRUSNÍK, Adam a Zdeněk BONAVENTURA. Studying a low-pressure microwave coaxial discharge in hydrogen using a mixed 2D/3D fluid model. Journal of physics D: Applied physics. Bristol, England: IOP Publishing Ltd., 2015, roč. 48, č. 6, s. "nestránkováno", 17 s. ISSN 0022-3727. Dostupné z: https://dx.doi.org/10.1088/0022-3727/48/6/065201.

@article{1219388,
   author = {Obrusník, Adam and Bonaventura, Zdeněk},
   article_location = {Bristol, England},
   article_number = {6},
   doi = {http://dx.doi.org/10.1088/0022-3727/48/6/065201},
   keywords = {microwave plasma; hydrogen; low-pressure; fluid model; coaxial discharge; plasmaline; nanocrystalline diamond},
   language = {eng},
   issn = {0022-3727},
   journal = {Journal of physics D: Applied physics},
   title = {Studying a low-pressure microwave coaxial discharge in hydrogen using a mixed 2D/3D fluid model},
   url = {http://stacks.iop.org/0022-3727/48/i=6/a=065201},
   volume = {48},
   year = {2015}
}

TY  - JOUR
ID  - 1219388
AU  - Obrusník, Adam - Bonaventura, Zdeněk
PY  - 2015
TI  - Studying a low-pressure microwave coaxial discharge in hydrogen using a mixed 2D/3D fluid model
JF  - Journal of physics D: Applied physics
VL  - 48
IS  - 6
SP  - "nestránkováno"
EP  - "nestránkováno"
PB  - IOP Publishing Ltd.
SN  - 00223727
KW  - microwave plasma
KW  - hydrogen
KW  - low-pressure
KW  - fluid model
KW  - coaxial discharge
KW  - plasmaline
KW  - nanocrystalline diamond
UR  - http://stacks.iop.org/0022-3727/48/i=6/a=065201
N2  - This work presents a numerical model of hydrogen plasma in a microwave coaxial discharge at low pressure (25–250 Pa). The model is a mixed two-dimensional (2D)/three-dimensional (3D) model in that it combines three-dimensional geometry for the electromagnetic field and two-dimensional geometry for the transport equations. The model is validated against experimental results available in the literature and, where possible, simulations of comparable discharges. The model shows reasonable agreement in the relevant pressure range. A parametric study with respect to pressure is carried out and it is observed that the plasma contracts towards the quartz tube with increasing pressure. Increasing the pressure also influences the abundance of H + ions but on the other hand it has little impact on hydrogen dissociation degree and electron temperature. Furthermore, the uniformity of the plasma above the substrate holder is analyzed. It is observed that at pressures over 150 Pa, the plasma gets non-uniform in the direction parallel to the plasma lines. Finally, the uniformity of particle and energy fluxes to the substrate holder are analyzed. Knowing the fluxes is especially useful for the material applications of the device.
ER  -

OBRUSNÍK, Adam a Zdeněk BONAVENTURA. Studying a low-pressure microwave coaxial discharge in hydrogen using a mixed 2D/3D fluid model. \textit{Journal of physics D: Applied physics}. Bristol, England: IOP Publishing Ltd., 2015, roč.~48, č.~6, s.~''nestránkováno'', 17 s. ISSN~0022-3727. Dostupné z: https://dx.doi.org/10.1088/0022-3727/48/6/065201.

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