MEMS Carbon Nanotubes Field Emission Pressure Sensor With
Simplified Design: Performance and Field Emission Properties
Study

J 2015

MEMS Carbon Nanotubes Field Emission Pressure Sensor With Simplified Design: Performance and Field Emission Properties Study

PEKÁREK, Jan; Radomír VRBA; Jan PRÁŠEK; Ondřej JAŠEK; Petra MAJZLIKOVA et al.

Základní údaje

Originální název

MEMS Carbon Nanotubes Field Emission Pressure Sensor With Simplified Design: Performance and Field Emission Properties Study

Název česky

MEMS senzor na bázi autoemise uhlíkových nanotrubek se zjednodušeným designem: studie autoemise a chování senzoru

Autoři

PEKÁREK, Jan; Radomír VRBA; Jan PRÁŠEK; Ondřej JAŠEK; Petra MAJZLIKOVA; Jana PEKÁRKOVÁ a Lenka ZAJÍČKOVÁ

Vydání

IEEE Sensors Journal, PISCATAWAY (USA), IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2015, 1530-437X

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

20201 Electrical and electronic engineering

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

IEEE Web

Impakt faktor

Impact factor: 1.889

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14740/15:00080659

Organizační jednotka

Středoevropský technologický institut

Klíčová slova česky

uhlíkové nanotrubky; autoemisní pole; mikromechanické systémy; mikrovlnný pochodňový výboj

Klíčová slova anglicky

Carbon nanotubes; field emitter arrays; microelectromechanical systems; microwave torch

Štítky

podil, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 19. 5. 2017 13:24, Mgr. Eva Špillingová

Anotace

ORIG CZ

V originále

The pressure sensor application gained recently substantial interest in many fields of basic and applied research and applications. In this paper, microelectromechanical system (MEMS)-based pressure sensor contains nanostructured electrode consisting of carbon nanotube (CNT) array. CNTs are directly grown on such electrode by plasma-enhanced chemical vapor deposition method using microwave plasma torch at atmospheric pressure. This growth method enables us to use a simple electrode structure without need of buffer layer and time-consuming lithography process. Combination of CNTs field emission and MEMS membrane mechanical properties make possible to enhance sensitivity of the sensor. Field emission properties of CNTs are measured by newly developed system enabling us precise measurement of expecting properties, such as dependence on diaphragm (upper electrode) distance, applied voltage, and stability of the sensor. Measured values are compared with a numerical modeling of the membrane system in Coventor Ware software by finite-element method. We also suggest encapsulating the sensor using glass frit bonding because such method is more suitable for high vacuum requirements of the field emission operation.

Česky

Aplikace senzorů tlaků mají v poslední době velký význam. V tomto článku je MEMs senzor založený na nanostrukturované elektrodě obsahující pole uhlíkových nanotrubek připravených pomocí metody PECVD mikrovlnných pochodňovým výbojem.

Návaznosti

ED1.1.00/02.0068, projekt VaV

Název: CEITEC - central european institute of technology

GAP205/10/1374, projekt VaV

Název: Syntéza uhlíkových nanotrubek plazmochemickou metodou a studium jejich funkčních vlastností

Investor: Grantová agentura ČR, Syntéza uhlíkových nanotrubek plazmochemickou metodou a studium jejich funkčních vlastností

Přiložené soubory

ZVV_2015_1219886_MEMS_Carbon_Nanotubes.pdf

Požádat o autorskou verzi souboru

MEMS_Carbon_Nanotubes_Field_Emission_Pressure_Sensor_With_Simplified_Design_Performance_and_Field_Emission_Properties_Study.pdf

Požádat o autorskou verzi souboru

Citovat

PEKÁREK, Jan; Radomír VRBA; Jan PRÁŠEK; Ondřej JAŠEK; Petra MAJZLIKOVA; Jana PEKÁRKOVÁ a Lenka ZAJÍČKOVÁ. MEMS Carbon Nanotubes Field Emission Pressure Sensor With Simplified Design: Performance and Field Emission Properties Study. IEEE Sensors Journal. PISCATAWAY (USA): IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2015, roč. 15, č. 3, s. 1430-1436. ISSN 1530-437X. Dostupné z: https://doi.org/10.1109/JSEN.2014.2363213.

@article{1219886,
   author = {Pekárek, Jan and Vrba, Radomír and Prášek, Jan and Jašek, Ondřej and Majzlikova, Petra and Pekárková, Jana and Zajíčková, Lenka},
   article_location = {PISCATAWAY (USA)},
   article_number = {3},
   doi = {https://doi.org/10.1109/JSEN.2014.2363213},
   keywords = {Carbon nanotubes; field emitter arrays; microelectromechanical systems; microwave torch},
   language = {eng},
   issn = {1530-437X},
   journal = {IEEE Sensors Journal},
   title = {MEMS Carbon Nanotubes Field Emission Pressure Sensor With Simplified Design: Performance and Field Emission Properties Study},
   url = {http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6933922},
   volume = {15},
   year = {2015}
}

TY  - JOUR
ID  - 1219886
AU  - Pekárek, Jan - Vrba, Radomír - Prášek, Jan - Jašek, Ondřej - Majzlikova, Petra - Pekárková, Jana - Zajíčková, Lenka
PY  - 2015
TI  - MEMS Carbon Nanotubes Field Emission Pressure Sensor With Simplified Design: Performance and Field Emission Properties Study
JF  - IEEE Sensors Journal
VL  - 15
IS  - 3
SP  - 1430-1436
EP  - 1430-1436
PB  - IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
SN  - 1530437X
KW  - Carbon nanotubes
KW  - field emitter arrays
KW  - microelectromechanical systems
KW  - microwave torch
UR  - http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6933922
L2  - http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6933922
N2  - The pressure sensor application gained recently substantial interest in many fields of basic and applied research and applications. In this paper, microelectromechanical system (MEMS)-based pressure sensor contains nanostructured electrode consisting of carbon nanotube (CNT) array. CNTs are directly grown on such electrode by plasma-enhanced chemical vapor deposition method using microwave plasma torch at atmospheric pressure. This growth method enables us to use a simple electrode structure without need of buffer layer and time-consuming lithography process. Combination of CNTs field emission and MEMS membrane mechanical properties make possible to enhance sensitivity of the sensor. Field emission properties of CNTs are measured by newly developed system enabling us precise measurement of expecting properties, such as dependence on diaphragm (upper electrode) distance, applied voltage, and stability of the sensor. Measured values are compared with a numerical modeling of the membrane system in Coventor Ware software by finite-element method. We also suggest encapsulating the sensor using glass frit bonding because such method is more suitable for high vacuum requirements of the field emission operation.
ER  -

PEKÁREK, Jan; Radomír VRBA; Jan PRÁŠEK; Ondřej JAŠEK; Petra MAJZLIKOVA; Jana PEKÁRKOVÁ a Lenka ZAJÍČKOVÁ. MEMS Carbon Nanotubes Field Emission Pressure Sensor With Simplified Design: Performance and Field Emission Properties Study. \textit{IEEE Sensors Journal}. PISCATAWAY (USA): IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2015, roč.~15, č.~3, s.~1430-1436. ISSN~1530-437X. Dostupné z: https://doi.org/10.1109/JSEN.2014.2363213.

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