| PEKÁREK, Jan, Radomír VRBA, Jan PRÁŠEK, Ondřej JAŠEK, Petra MAJZLIKOVA, Jana PEKÁRKOVÁ a Lenka ZAJÍČKOVÁ. MEMS Carbon Nanotubes Field Emission Pressure Sensor With Simplified Design: Performance and Field Emission Properties Study. IEEE Sensors Journal. PISCATAWAY (USA): IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2015, roč. 15, č. 3, s. 1430-1436. ISSN 1530-437X. Dostupné z: https://dx.doi.org/10.1109/JSEN.2014.2363213. |
Další formáty:
BibTeX
LaTeX
RIS
@article{1219886,
author = {Pekárek, Jan and Vrba, Radomír and Prášek, Jan and Jašek, Ondřej and Majzlikova, Petra and Pekárková, Jana and Zajíčková, Lenka},
article_location = {PISCATAWAY (USA)},
article_number = {3},
doi = {http://dx.doi.org/10.1109/JSEN.2014.2363213},
keywords = {Carbon nanotubes; field emitter arrays; microelectromechanical systems; microwave torch},
language = {eng},
issn = {1530-437X},
journal = {IEEE Sensors Journal},
title = {MEMS Carbon Nanotubes Field Emission Pressure Sensor With Simplified Design: Performance and Field Emission Properties Study},
url = {http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6933922},
volume = {15},
year = {2015}
}
TY - JOUR
ID - 1219886
AU - Pekárek, Jan - Vrba, Radomír - Prášek, Jan - Jašek, Ondřej - Majzlikova, Petra - Pekárková, Jana - Zajíčková, Lenka
PY - 2015
TI - MEMS Carbon Nanotubes Field Emission Pressure Sensor With Simplified Design: Performance and Field Emission Properties Study
JF - IEEE Sensors Journal
VL - 15
IS - 3
SP - 1430-1436
EP - 1430-1436
PB - IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
SN - 1530437X
KW - Carbon nanotubes
KW - field emitter arrays
KW - microelectromechanical systems
KW - microwave torch
UR - http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6933922
L2 - http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6933922
N2 - The pressure sensor application gained recently substantial interest in many fields of basic and applied research and applications. In this paper, microelectromechanical system (MEMS)-based pressure sensor contains nanostructured electrode consisting of carbon nanotube (CNT) array. CNTs are directly grown on such electrode by plasma-enhanced chemical vapor deposition method using microwave plasma torch at atmospheric pressure. This growth method enables us to use a simple electrode structure without need of buffer layer and time-consuming lithography process. Combination of CNTs field emission and MEMS membrane mechanical properties make possible to enhance sensitivity of the sensor. Field emission properties of CNTs are measured by newly developed system enabling us precise measurement of expecting properties, such as dependence on diaphragm (upper electrode) distance, applied voltage, and stability of the sensor. Measured values are compared with a numerical modeling of the membrane system in Coventor Ware software by finite-element method. We also suggest encapsulating the sensor using glass frit bonding because such method is more suitable for high vacuum requirements of the field emission operation.
ER -
PEKÁREK, Jan, Radomír VRBA, Jan PRÁŠEK, Ondřej JAŠEK, Petra MAJZLIKOVA, Jana PEKÁRKOVÁ a Lenka ZAJÍČKOVÁ. MEMS Carbon Nanotubes Field Emission Pressure Sensor With Simplified Design: Performance and Field Emission Properties Study. \textit{IEEE Sensors Journal}. PISCATAWAY (USA): IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2015, roč.~15, č.~3, s.~1430-1436. ISSN~1530-437X. Dostupné z: https://dx.doi.org/10.1109/JSEN.2014.2363213.
|
