VON KÄNEL, Hans, Fabio ISA, Claudiu Valentin FALUB, E. J. BARTHAZY, Elisabeth MÜLLER, Daniel CHRASTINA, Giovanni ISELLA, Thomas KREILIGER, Alfonso TABOADA, Mojmír MEDUŇA, R. KAUFMANN, A. NEELS, Alex DOMMANN, Philippe NIEDERMANN, F. MANCARELLA, M. MAUCERI, M. PUGLISI, D. CRIPPA, F. LA VIA, R. ANZALONE, N. PILUSO, Roberto BERGAMASCHINI, Anna MARZEGALLI a Leo MIGLIO. Three-dimensional Epitaxial Si1-xGex, Ge and SiC Crystals on Deeply Patterned Si Substrates. In SIGE, GE, AND RELATED COMPOUNDS 6: MATERIALS, PROCESSING, AND DEVICES. Pennington: Electrochemical Society Inc., 2014, s. 631-648. ISBN 978-1-60768-543-2. Dostupné z: https://dx.doi.org/10.1149/06406.0631ecst. |
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@inproceedings{1228186, author = {von Känel, Hans and Isa, Fabio and Falub, Claudiu Valentin and Barthazy, E. J. and Müller, Elisabeth and Chrastina, Daniel and Isella, Giovanni and Kreiliger, Thomas and Taboada, Alfonso and Meduňa, Mojmír and Kaufmann, R. and Neels, A. and Dommann, Alex and Niedermann, Philippe and Mancarella, F. and Mauceri, M. and Puglisi, M. and Crippa, D. and La Via, F. and Anzalone, R. and Piluso, N. and Bergamaschini, Roberto and Marzegalli, Anna and Miglio, Leo}, address = {Pennington}, booktitle = {SIGE, GE, AND RELATED COMPOUNDS 6: MATERIALS, PROCESSING, AND DEVICES}, doi = {http://dx.doi.org/10.1149/06406.0631ecst}, keywords = {Aspect ratio; Chemical vapor deposition; Crystals; Dislocations; Germanium; Silicon; heteroepitaxy}, howpublished = {tištěná verze "print"}, language = {eng}, location = {Pennington}, isbn = {978-1-60768-543-2}, pages = {631-648}, publisher = {Electrochemical Society Inc.}, title = {Three-dimensional Epitaxial Si1-xGex, Ge and SiC Crystals on Deeply Patterned Si Substrates}, url = {http://ma.ecsdl.org/content/MA2014-02/35/1822.abstract}, year = {2014} }
TY - JOUR ID - 1228186 AU - von Känel, Hans - Isa, Fabio - Falub, Claudiu Valentin - Barthazy, E. J. - Müller, Elisabeth - Chrastina, Daniel - Isella, Giovanni - Kreiliger, Thomas - Taboada, Alfonso - Meduňa, Mojmír - Kaufmann, R. - Neels, A. - Dommann, Alex - Niedermann, Philippe - Mancarella, F. - Mauceri, M. - Puglisi, M. - Crippa, D. - La Via, F. - Anzalone, R. - Piluso, N. - Bergamaschini, Roberto - Marzegalli, Anna - Miglio, Leo PY - 2014 TI - Three-dimensional Epitaxial Si1-xGex, Ge and SiC Crystals on Deeply Patterned Si Substrates PB - Electrochemical Society Inc. CY - Pennington SN - 9781607685432 KW - Aspect ratio KW - Chemical vapor deposition KW - Crystals KW - Dislocations KW - Germanium KW - Silicon KW - heteroepitaxy UR - http://ma.ecsdl.org/content/MA2014-02/35/1822.abstract L2 - http://ma.ecsdl.org/content/MA2014-02/35/1822.abstract N2 - We have recently demonstrated for the example of Ge/Si(001) that crystal defects, wafer bowing can be avoided by combining deep substrate patterning, resulting in dense arrays of highly perfect three-dimensional epitaxial crystals. Here we discuss the extension of the method to layer/substrate combinations with lattice misfits ranging from zero for pure Si/Si(001) up to 20% for 3C-SiC/Si(001). ER -
VON KÄNEL, Hans, Fabio ISA, Claudiu Valentin FALUB, E. J. BARTHAZY, Elisabeth MÜLLER, Daniel CHRASTINA, Giovanni ISELLA, Thomas KREILIGER, Alfonso TABOADA, Mojmír MEDUŇA, R. KAUFMANN, A. NEELS, Alex DOMMANN, Philippe NIEDERMANN, F. MANCARELLA, M. MAUCERI, M. PUGLISI, D. CRIPPA, F. LA VIA, R. ANZALONE, N. PILUSO, Roberto BERGAMASCHINI, Anna MARZEGALLI a Leo MIGLIO. Three-dimensional Epitaxial Si1-xGex, Ge and SiC Crystals on Deeply Patterned Si Substrates. In \textit{SIGE, GE, AND RELATED COMPOUNDS 6: MATERIALS, PROCESSING, AND DEVICES}. Pennington: Electrochemical Society Inc., 2014, s.~631-648. ISBN~978-1-60768-543-2. Dostupné z: https://dx.doi.org/10.1149/06406.0631ecst.
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