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@misc{1232888,
author = {Münz, Filip and Humlíček, Josef},
address = {Masarykova univerzita, Brno},
keywords = {layered structures; SOI; GaN; AlGaN; silicon},
language = {eng},
location = {Masarykova univerzita, Brno},
publisher = {ONSEMI},
title = {Imaging in NIR *SOI, GaN},
year = {2014}
}
TY - GEN
ID - 1232888
AU - Münz, Filip - Humlíček, Josef
PY - 2014
TI - Imaging in NIR *SOI, GaN
VL - Report LDDA 2014
PB - ONSEMI
CY - Masarykova univerzita, Brno
KW - layered structures
KW - SOI
KW - GaN
KW - AlGaN
KW - silicon
N2 - *Tools for imaging of interferences in thin layers. Completed prototype of equipment for imaging of interferences on 150 mm GaN on Si and 150 and 200 mm SOI wafers. Validate the method and equipment with analysis of SOI and GaN wafers (comparison of thickness maps with FTIR and SEM values. Prepare basic technical documentation, working instructions, recipes and metrological instructions.
ER -
MÜNZ, Filip a Josef HUMLÍČEK. \textit{Imaging in NIR *SOI, GaN}. Masarykova univerzita, Brno: ONSEMI, 2014, 20 s. Report LDDA 2014.
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