Physical Vapour Deposition of As-Te glass layers and Mass
Spectrometry analysis

a 2015

Physical Vapour Deposition of As-Te glass layers and Mass Spectrometry analysis

ŠTĚPÁNOVÁ, Vlasta, Lubomír PROKEŠ, Pavel SLAVÍČEK, Milan ALBERTI, Josef HAVEL et. al.

Základní údaje

Originální název

Physical Vapour Deposition of As-Te glass layers and Mass Spectrometry analysis

Autoři

ŠTĚPÁNOVÁ, Vlasta (203 Česká republika, garant, domácí), Lubomír PROKEŠ (203 Česká republika, domácí), Pavel SLAVÍČEK (203 Česká republika, domácí), Milan ALBERTI (203 Česká republika, domácí) a Josef HAVEL (203 Česká republika, domácí)

Vydání

CEITEC PhD Retreat, 23-24 April 2015, Valtice, Czech Republic, 2015

Další údaje

Jazyk

angličtina

Typ výsledku

Konferenční abstrakt

Obor

10305 Fluids and plasma physics

Stát vydavatele

Česká republika

Utajení

není předmětem státního či obchodního tajemství

Kód RIV

RIV/00216224:14310/15:00080934

Organizační jednotka

Přírodovědecká fakulta

ISBN

978-80-210-7825-3

Klíčová slova anglicky

LDI TOF MS; chalcogenide glasses; As-Te glass layers; PVD; thermal evaporation

Štítky

AKR

Změněno: 28. 4. 2016 14:40, Ing. Andrea Mikešková

Anotace

V originále

The aim of this work is to introduce the preparation and analysis of chalcogenide glass thin films. Chalcogenide glasses show remarkable optical or physico-chemical properties and are finding applications in electronics, computer technology, optoelectronics, optical modulation, energy generation, and optical sensors. Arsenic tellurium glassy layers were prepared via Physical Vapour Deposition (PVD) – thermal evaporation from As-Te mixtures. Interaction of tellurium with arsenic was studied via laser ablation synthesis using Laser Desorption Ionisation Time of Flight Mass Spectrometry (LDI TOF MS) which has a high potential for generation of new compounds. Clusters of As-Te were generated using nitrogen laser while stoichiometry of AsmTen was determined via analysis of isotopic envelopes and computer modeling. Scanning Electron Microscope (SEM) was used for characterization the topology of deposited layers and Energy Dispersive X-ray spectroscopy (EDX) was used for evaluation the distribution of arsenic and tellurium in layer. Laser ablation synthesis with LDI TOF MS shows formation of AsmTen clusters. Distribution of arsenic and tellurium in cross section of layer was homogenous. New As-Te glass layers were manufactured and analyzed. Determined stoichiometry of As-Te clusters might inspire the development of new chalcogenide materials.

Návaznosti

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GA13-05082S, projekt VaV

Název: Analýza a aplikace plazmatických procesů pro přípravu tenkých vrstev amorfních chalkogenidů

Investor: Grantová agentura ČR, Analýza a aplikace plazmatických procesů pro přípravu tenkých vrstev amorfních chalkogenidů

Citovat

ŠTĚPÁNOVÁ, Vlasta, Lubomír PROKEŠ, Pavel SLAVÍČEK, Milan ALBERTI a Josef HAVEL. Physical Vapour Deposition of As-Te glass layers and Mass Spectrometry analysis. In CEITEC PhD Retreat, 23-24 April 2015, Valtice, Czech Republic. 2015. ISBN 978-80-210-7825-3.

@proceedings{1306968,
   author = {Štěpánová, Vlasta and Prokeš, Lubomír and Slavíček, Pavel and Alberti, Milan and Havel, Josef},
   booktitle = {CEITEC PhD Retreat, 23-24 April 2015, Valtice, Czech Republic},
   keywords = {LDI TOF MS; chalcogenide glasses; As-Te glass layers; PVD; thermal evaporation},
   language = {eng},
   isbn = {978-80-210-7825-3},
   title = {Physical Vapour Deposition of As-Te glass layers and Mass Spectrometry analysis},
   year = {2015}
}

TY  - CONF
ID  - 1306968
AU  - Štěpánová, Vlasta - Prokeš, Lubomír - Slavíček, Pavel - Alberti, Milan - Havel, Josef
PY  - 2015
TI  - Physical Vapour Deposition of As-Te glass layers and Mass Spectrometry analysis
SN  - 9788021078253
KW  - LDI TOF MS
KW  - chalcogenide glasses
KW  - As-Te glass layers
KW  - PVD
KW  - thermal evaporation
N2  - The aim of this work is to introduce the preparation and analysis of chalcogenide glass thin films. Chalcogenide glasses show remarkable optical or physico-chemical properties and are finding applications in electronics, computer technology, optoelectronics, optical modulation, energy generation, and optical sensors. Arsenic tellurium glassy layers were prepared via Physical Vapour Deposition (PVD) – thermal evaporation from As-Te mixtures. Interaction of tellurium with arsenic was studied via laser ablation synthesis using Laser Desorption Ionisation Time of Flight Mass Spectrometry (LDI TOF MS) which has a high potential for generation of new compounds. Clusters of As-Te were generated using nitrogen laser while stoichiometry of AsmTen was determined via analysis of isotopic envelopes and computer modeling. Scanning Electron Microscope (SEM) was used for characterization the topology of deposited layers and Energy Dispersive X-ray spectroscopy (EDX) was used for evaluation the distribution of arsenic and tellurium in layer. Laser ablation synthesis with LDI TOF MS shows formation of AsmTen clusters. Distribution of arsenic and tellurium in cross section of layer was homogenous. New As-Te glass layers were manufactured and analyzed. Determined stoichiometry of As-Te clusters might inspire the development of new chalcogenide materials.
ER  -

ŠTĚPÁNOVÁ, Vlasta, Lubomír PROKEŠ, Pavel SLAVÍČEK, Milan ALBERTI a Josef HAVEL. Physical Vapour Deposition of As-Te glass layers and Mass Spectrometry analysis. In \textit{CEITEC PhD Retreat, 23-24 April 2015, Valtice, Czech Republic}. 2015. ISBN~978-80-210-7825-3.

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