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@proceedings{1309234,
author = {Klein, Peter and Hnilica, Jaroslav and Hubička, Zdeněk and Čada, Martin and Vašina, Petr},
booktitle = {22nd International Symposium on Plasma Chemistry},
keywords = {HiPIMS; spokes; magnetron sputtering; plasma instabilities},
language = {eng},
title = {Spoke induced cathode voltage and discharge current oscillations in HiPIMS},
url = {http://www.ispc-conference.org/ispcproc/ispc22/P-I-1-5.pdf},
year = {2015}
}
TY - CONF
ID - 1309234
AU - Klein, Peter - Hnilica, Jaroslav - Hubička, Zdeněk - Čada, Martin - Vašina, Petr
PY - 2015
TI - Spoke induced cathode voltage and discharge current oscillations in HiPIMS
KW - HiPIMS
KW - spokes
KW - magnetron sputtering
KW - plasma instabilities
UR - http://www.ispc-conference.org/ispcproc/ispc22/P-I-1-5.pdf
L2 - http://www.ispc-conference.org/ispcproc/ispc22/P-I-1-5.pdf
N2 - The oscillations were observed on cathode voltage and discharge current temporal evolution in HiPIMS pulse. The frequency of the oscillations depends at given pressure only on actual value of the discharge current. Rotation of the spokes over the cathode and the frequency of the oscillations shows different trends. The oscillations are observed at conditions where at least certain critical amount of spokes emerges.
ER -
KLEIN, Peter, Jaroslav HNILICA, Zdeněk HUBIČKA, Martin ČADA and Petr VAŠINA. Spoke induced cathode voltage and discharge current oscillations in HiPIMS. In \textit{22nd International Symposium on Plasma Chemistry}. 2015.
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