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@proceedings{1312025,
author = {Klein, Peter and Hnilica, Jaroslav and Vašina, Petr and Hubička, Zdeněk and Čada, Martin},
booktitle = {Sixth International Conference on Fundamentals and Industrial Applications of HIPIMS},
keywords = {HIPIMS;spoke;oscillation},
language = {eng},
title = {Cathode voltage and discharge current oscillations and spoke behavior during HiPIMS discharge},
year = {2015}
}
TY - CONF
ID - 1312025
AU - Klein, Peter - Hnilica, Jaroslav - Vašina, Petr - Hubička, Zdeněk - Čada, Martin
PY - 2015
TI - Cathode voltage and discharge current oscillations and spoke behavior during HiPIMS discharge
KW - HIPIMS;spoke;oscillation
N2 - The spokes presence and their behavior were studied by high-speed imaging. The spoke appearance was strongly dependent on the pressure. At very low pressure, the triangular spoke shape was well recognized but with increasing pressure the shape became diffusive. Overreaching 2 Pa there was no spokes recognizable. Camera enables to record two successive images from the same pulse with time delay of 3 µs.Spoke rotation velocity and frequency was derived from the spoke image shift in the pressure range 0.18-0.5 Pa, where the spokes were well distinguished. The spoke characteristic frequency was arbitrary determined as multiplication of number of spokes with rotation frequency and ranges from 77 to 178 kHz. Spoke characteristic frequency is in the same order of magnitude as observed oscillations on cathode voltage and discharge current, nevertheless they are not identical. Spoke characteristic frequency is 3-4 times lower than the frequency of the oscillations.
ER -
KLEIN, Peter, Jaroslav HNILICA, Petr VAŠINA, Zdeněk HUBIČKA a Martin ČADA. Cathode voltage and discharge current oscillations and spoke behavior during HiPIMS discharge. In \textit{Sixth International Conference on Fundamentals and Industrial Applications of HIPIMS}. 2015.
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