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@inproceedings{1320668,
author = {Fekete, Matej and Hnilica, Jaroslav and Vašina, Petr},
address = {Brno},
booktitle = {Potential Application of Plasma and Nanomaterials 2015},
edition = {1.},
editor = {Jan Čech, Pavel Souček, Dana Skácelová, Jaroslav Hnilica},
keywords = {HIPIMS; OES; titanium},
howpublished = {elektronická verze "online"},
language = {eng},
location = {Brno},
isbn = {978-80-210-8053-9},
pages = {22-27},
publisher = {Masaryk University},
title = {Effect of pulse off time on temporal evolution of sputtered species densities in multi-pulse HiPIMS discharge},
url = {https://munispace.muni.cz/index.php/munispace/catalog/book/792},
year = {2015}
}
TY - JOUR
ID - 1320668
AU - Fekete, Matej - Hnilica, Jaroslav - Vašina, Petr
PY - 2015
TI - Effect of pulse off time on temporal evolution of sputtered species densities in multi-pulse HiPIMS discharge
PB - Masaryk University
CY - Brno
SN - 9788021080539
KW - HIPIMS
KW - OES
KW - titanium
UR - https://munispace.muni.cz/index.php/munispace/catalog/book/792
L2 - https://munispace.muni.cz/index.php/munispace/catalog/book/792
N2 - The aim of this paper is to experimentally study effect of preceding pulse on the temporal evolution of number densities of sputtered species during the subsequent pulse for different delay time between two successive high-power pulses in the pulse packet. Time evolutions of sputtered species during and after pulse in single-pulse mode are presented, too. Intensities of selected lines of buffer gas were acquired during every measurement.
ER -
FEKETE, Matej, Jaroslav HNILICA a Petr VAŠINA. Effect of pulse off time on temporal evolution of sputtered species densities in multi-pulse HiPIMS discharge. Online. In Jan Čech, Pavel Souček, Dana Skácelová, Jaroslav Hnilica. \textit{Potential Application of Plasma and Nanomaterials 2015}. 1. vyd. Brno: Masaryk University, 2015, s.~22-27. ISBN~978-80-210-8053-9.
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