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@inproceedings{1348856,
author = {Šperka, Jiří and Jašek, Ondřej and Zajíčková, Lenka and Havel, Josef},
address = {SLEZSKA},
booktitle = {NANOCON 2015: 7TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION},
edition = {1},
keywords = {Nanowires; Silicon; Gold; Eutectics; Surface processes},
howpublished = {paměťový nosič},
language = {eng},
location = {SLEZSKA},
isbn = {978-80-87294-63-5},
pages = {79-84},
publisher = {TANGER LTD},
title = {GROWTH OF SILICON NANOWIRES BY THERMAL ANNEALING OF THICK GOLD CATALYTIC LAYER ON SILICON SUBSTRATE UNDER DIFFERENT ATMOSPHERES},
url = {http://www.nanocon.eu},
year = {2015}
}
TY - JOUR
ID - 1348856
AU - Šperka, Jiří - Jašek, Ondřej - Zajíčková, Lenka - Havel, Josef
PY - 2015
TI - GROWTH OF SILICON NANOWIRES BY THERMAL ANNEALING OF THICK GOLD CATALYTIC LAYER ON SILICON SUBSTRATE UNDER DIFFERENT ATMOSPHERES
PB - TANGER LTD
CY - SLEZSKA
SN - 9788087294635
KW - Nanowires
KW - Silicon
KW - Gold
KW - Eutectics
KW - Surface processes
UR - http://www.nanocon.eu
N2 - Silicon nanowires (Si NWs) were grown from Si wafer upon thermal annealing in the presence of catalytic gold layer. The Si substrate coated with 100 nm thick Au sputtered layer was thermally annealed at 1000 degrees C for 60 min in argon and hydrogen atmosphere at 8 kPa. The influence of argon and hydrogen atmospheres on the growth of Si NWs was investigated. It was found that by using the hydrogen atmosphere we were able to grow Si NWs, while the growth in argon atmosphere was sporadic. The catalytic layer morphology and composition were examined using atomic force microscopy and laser desorption-ionization time of flight mass spectrometry, while nanowire structure was observed through scanning electron microscope and energy dispersive X-ray spectroscopy.
ER -
ŠPERKA, Jiří, Ondřej JAŠEK, Lenka ZAJÍČKOVÁ a Josef HAVEL. GROWTH OF SILICON NANOWIRES BY THERMAL ANNEALING OF THICK GOLD CATALYTIC LAYER ON SILICON SUBSTRATE UNDER DIFFERENT ATMOSPHERES. In \textit{NANOCON 2015: 7TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH \&{}amp; APPLICATION}. 1. vyd. SLEZSKA: TANGER LTD, 2015, s.~79-84. ISBN~978-80-87294-63-5.
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