Principles and practice of an automatic process control for the
deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD
under industrial conditions

J 2016

Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions

ŽEMLIČKA, Radek, Mojmír JÍLEK, Petr VOGL, Jaroslav ŠRÁMEK, Pavel SOUČEK et. al.

Základní údaje

Originální název

Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions

Autoři

ŽEMLIČKA, Radek (203 Česká republika, domácí), Mojmír JÍLEK (203 Česká republika), Petr VOGL (203 Česká republika), Jaroslav ŠRÁMEK (203 Česká republika), Pavel SOUČEK (203 Česká republika, domácí), Vilma BURŠÍKOVÁ (203 Česká republika, domácí) a Petr VAŠINA (203 Česká republika, garant, domácí)

Vydání

Surface & coatings technology, Elsevier, 2016, 0257-8972

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 2.589

Kód RIV

RIV/00216224:14310/16:00088074

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1016/j.surfcoat.2016.06.061

UT WoS

000384775900002

Klíčová slova anglicky

Nanocomposites; Magnetron sputtering; Process control; Mechanical properties; Titanium-carbon coatings; DLC; Industrial process

Štítky

AKR, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 15. 3. 2018 09:58, doc. RNDr. Vilma Buršíková, Ph.D.

Anotace

V originále

A study of a hybrid PVD-PECVD process of sputtering a titanium target in an argon/acetylene gas mixture was performed. This process was used for the deposition of nanocomposite coatings consisting of titanium carbide grains embedded in an amorphous hydrogenated carbon matrix (nc-TiC/a-C:H). The study was performed under industrial conditions employing a large-scale deposition device with a cylindrical sputtering cathode. When the acetylene supply was gradually increased, a discharge voltage drop and total pressure saturation simultaneously occurred at a certain acetylene supply. The hardest coatings were found always to be deposited at the acetylene supply corresponding to these deposition conditions. However, the acetylene supply to detect the voltage drop and pressure saturation was determined to be dependent on the cathode thickness. A fully automatic procedure suitable for the preparation of hard nc-TiC/a-C:H coatings by the hybrid PVD-PECVD process was proposed in this paper. This approach ensured that the optimal deposition setting was consistently found for the deposition process independent of the cathode thickness. The procedure was thoroughly tested, and it was demonstrated to be reliable and robust. Furthermore, the algorithm ensured the deposition of coatings with the same composition and the same high hardness throughout the cathode lifetime.

Návaznosti

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GAP205/12/0407, projekt VaV

Název: Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Investor: Grantová agentura ČR, Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

ŽEMLIČKA, Radek, Mojmír JÍLEK, Petr VOGL, Jaroslav ŠRÁMEK, Pavel SOUČEK, Vilma BURŠÍKOVÁ a Petr VAŠINA. Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions. Surface & coatings technology. Elsevier, 2016, roč. 304, October, s. 9-15. ISSN 0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2016.06.061.

@article{1351322,
   author = {Žemlička, Radek and Jílek, Mojmír and Vogl, Petr and Šrámek, Jaroslav and Souček, Pavel and Buršíková, Vilma and Vašina, Petr},
   article_number = {October},
   doi = {http://dx.doi.org/10.1016/j.surfcoat.2016.06.061},
   keywords = {Nanocomposites; Magnetron sputtering; Process control; Mechanical properties; Titanium-carbon coatings; DLC; Industrial process},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface & coatings technology},
   title = {Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions},
   url = {http://www.sciencedirect.com/science/article/pii/S0257897216305539},
   volume = {304},
   year = {2016}
}

TY  - JOUR
ID  - 1351322
AU  - Žemlička, Radek - Jílek, Mojmír - Vogl, Petr - Šrámek, Jaroslav - Souček, Pavel - Buršíková, Vilma - Vašina, Petr
PY  - 2016
TI  - Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions
JF  - Surface & coatings technology
VL  - 304
IS  - October
SP  - 9-15
EP  - 9-15
PB  - Elsevier
SN  - 02578972
KW  - Nanocomposites
KW  - Magnetron sputtering
KW  - Process control
KW  - Mechanical properties
KW  - Titanium-carbon coatings
KW  - DLC
KW  - Industrial process
UR  - http://www.sciencedirect.com/science/article/pii/S0257897216305539
N2  - A study of a hybrid PVD-PECVD process of sputtering a titanium target in an argon/acetylene gas mixture was performed. This process was used for the deposition of nanocomposite coatings consisting of titanium carbide grains embedded in an amorphous hydrogenated carbon matrix (nc-TiC/a-C:H). The study was performed under industrial conditions employing a large-scale deposition device with a cylindrical sputtering cathode. When the acetylene supply was gradually increased, a discharge voltage drop and total pressure saturation simultaneously occurred at a certain acetylene supply. The hardest coatings were found always to be deposited at the acetylene supply corresponding to these deposition conditions. However, the acetylene supply to detect the voltage drop and pressure saturation was determined to be dependent on the cathode thickness. A fully automatic procedure suitable for the preparation of hard nc-TiC/a-C:H coatings by the hybrid PVD-PECVD process was proposed in this paper. This approach ensured that the optimal deposition setting was consistently found for the deposition process independent of the cathode thickness. The procedure was thoroughly tested, and it was demonstrated to be reliable and robust. Furthermore, the algorithm ensured the deposition of coatings with the same composition and the same high hardness throughout the cathode lifetime.
ER  -

ŽEMLIČKA, Radek, Mojmír JÍLEK, Petr VOGL, Jaroslav ŠRÁMEK, Pavel SOUČEK, Vilma BURŠÍKOVÁ a Petr VAŠINA. Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions. \textit{Surface \&{} coatings technology}. Elsevier, 2016, roč.~304, October, s.~9-15. ISSN~0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2016.06.061.

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