| GALMIZ, Oleksandr, Antonín BRABLEC a Vít KUDRLE. Deposition of thin zinc films by atmospheric pressure plasma jet in aqueous media. In Mirko Cernak, Tomas Hoder. Hakone XV: International Symposium of High Pressure low Temperature Plasma Chemistry. Brno: Masaryk University, 2016, s. 279-282. ISBN 978-80-210-8318-9. |
Další formáty:
BibTeX
LaTeX
RIS
@inproceedings{1358253,
author = {Galmiz, Oleksandr and Brablec, Antonín and Kudrle, Vít},
address = {Brno},
booktitle = {Hakone XV: International Symposium of High Pressure low Temperature Plasma Chemistry},
editor = {Mirko Cernak, Tomas Hoder},
keywords = {atmospheric plasma jet; thin film deposition; zinc},
howpublished = {tištěná verze "print"},
language = {eng},
location = {Brno},
isbn = {978-80-210-8318-9},
pages = {279-282},
publisher = {Masaryk University},
title = {Deposition of thin zinc films by atmospheric pressure plasma jet in aqueous media},
year = {2016}
}
TY - JOUR
ID - 1358253
AU - Galmiz, Oleksandr - Brablec, Antonín - Kudrle, Vít
PY - 2016
TI - Deposition of thin zinc films by atmospheric pressure plasma jet in aqueous media
PB - Masaryk University
CY - Brno
SN - 9788021083189
KW - atmospheric plasma jet
KW - thin film deposition
KW - zinc
N2 - Argon plasma jet was operated at atmospheric pressure in contact with aqueous solution of a zinc salt in order to deposit thin films on silicon substrates immersed in the liquid. The thickness of the films was determined by a profilometer while the chemical composition was analysed by XPS technique. The experiments revealed the importance of the submersion depth of the substrate which strongly affects the energy and particle influx.
ER -
GALMIZ, Oleksandr, Antonín BRABLEC a Vít KUDRLE. Deposition of thin zinc films by atmospheric pressure plasma jet in aqueous media. In Mirko Cernak, Tomas Hoder. \textit{Hakone XV: International Symposium of High Pressure low Temperature Plasma Chemistry}. Brno: Masaryk University, 2016, s.~279-282. ISBN~978-80-210-8318-9.
|
