KLIMASHIN, Fedor F., Nikola KOUTNÁ, Holger EUCHNER, David HOLEC a Paul H. MAYRHOFER. The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films. Journal of Applied Physics. Melville: AMER INST PHYSICS, 2016, roč. 120, č. 18, s. "nestrankovano", 10 s. ISSN 0021-8979. Dostupné z: https://dx.doi.org/10.1063/1.4966664. |
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@article{1366455, author = {Klimashin, Fedor F. and Koutná, Nikola and Euchner, Holger and Holec, David and Mayrhofer, Paul H.}, article_location = {Melville}, article_number = {18}, doi = {http://dx.doi.org/10.1063/1.4966664}, keywords = {molybdenum nitride; PVD; vacancies}, language = {eng}, issn = {0021-8979}, journal = {Journal of Applied Physics}, title = {The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films}, url = {https://aip.scitation.org/doi/10.1063/1.4966664}, volume = {120}, year = {2016} }
TY - JOUR ID - 1366455 AU - Klimashin, Fedor F. - Koutná, Nikola - Euchner, Holger - Holec, David - Mayrhofer, Paul H. PY - 2016 TI - The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films JF - Journal of Applied Physics VL - 120 IS - 18 SP - "nestrankovano" EP - "nestrankovano" PB - AMER INST PHYSICS SN - 00218979 KW - molybdenum nitride KW - PVD KW - vacancies UR - https://aip.scitation.org/doi/10.1063/1.4966664 L2 - https://aip.scitation.org/doi/10.1063/1.4966664 N2 - Based on a combined computational and experimental study, we show that besides the thermodynamically stable beta-MoN0.5 and delta(2)-MoN phases, also metastable gamma-MoNx and its ordered relative gamma'-MoNx can be synthesized by physical vapor deposition. The formation of the NaCl-based gamma-MoNx phase is favored for nitrogen concentrations between 23 and 34 at.% (i.e., x = 0.30-0.53). Higher nitrogen contents (close to the 3:2 stoichiometry, hence, MoN0.67) favor the ordering of the vacancies at the nitrogen sublattice (hence, gamma'-MoNx). The highest hardness of similar to 33 GPa is obtained for single-phase cubic-structured gamma-MoN0.53 coatings, whereas the ordered gamma'-MoN0.67 coatings are slightly softer with a hardness of similar to 28 GPa. ER -
KLIMASHIN, Fedor F., Nikola KOUTNÁ, Holger EUCHNER, David HOLEC a Paul H. MAYRHOFER. The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films. \textit{Journal of Applied Physics}. Melville: AMER INST PHYSICS, 2016, roč.~120, č.~18, s.~''nestrankovano'', 10 s. ISSN~0021-8979. Dostupné z: https://dx.doi.org/10.1063/1.4966664.
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