The impact of nitrogen content and vacancies on structure and
mechanical properties of Mo-N thin films

J 2016

The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films

KLIMASHIN, Fedor F.; Nikola KOUTNÁ; Holger EUCHNER; David HOLEC; Paul H. MAYRHOFER et. al.

Basic information

Original name

The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films

Authors

KLIMASHIN, Fedor F. (643 Russian Federation); Nikola KOUTNÁ (203 Czech Republic, belonging to the institution); Holger EUCHNER (276 Germany); David HOLEC (203 Czech Republic) and Paul H. MAYRHOFER (40 Austria)

Edition

Journal of Applied Physics, Melville, AMER INST PHYSICS, 2016, 0021-8979

Other information

Language

English

Type of outcome

Article in a journal

Field of Study

10302 Condensed matter physics

Country of publisher

United States of America

Confidentiality degree

is not subject to a state or trade secret

References:

Full Text

Impact factor

Impact factor: 2.068

RIV identification code

RIV/00216224:14310/16:00092633

Organization unit

Faculty of Science

DOI

https://doi.org/10.1063/1.4966664

UT WoS

000388734700023

EID Scopus

2-s2.0-84994853523

Keywords in English

molybdenum nitride; PVD; vacancies

Abstract

In the original language

Based on a combined computational and experimental study, we show that besides the thermodynamically stable beta-MoN0.5 and delta(2)-MoN phases, also metastable gamma-MoNx and its ordered relative gamma'-MoNx can be synthesized by physical vapor deposition. The formation of the NaCl-based gamma-MoNx phase is favored for nitrogen concentrations between 23 and 34 at.% (i.e., x = 0.30-0.53). Higher nitrogen contents (close to the 3:2 stoichiometry, hence, MoN0.67) favor the ordering of the vacancies at the nitrogen sublattice (hence, gamma'-MoNx). The highest hardness of similar to 33 GPa is obtained for single-phase cubic-structured gamma-MoN0.53 coatings, whereas the ordered gamma'-MoN0.67 coatings are slightly softer with a hardness of similar to 28 GPa.

Cite

KLIMASHIN, Fedor F.; Nikola KOUTNÁ; Holger EUCHNER; David HOLEC and Paul H. MAYRHOFER. The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films. Journal of Applied Physics. Melville: AMER INST PHYSICS, 2016, vol. 120, No 18, p. "nestrankovano", 10 pp. ISSN 0021-8979. Available from: https://doi.org/10.1063/1.4966664.

@article{1366455,
   author = {Klimashin, Fedor F. and Koutná, Nikola and Euchner, Holger and Holec, David and Mayrhofer, Paul H.},
   article_location = {Melville},
   article_number = {18},
   doi = {https://doi.org/10.1063/1.4966664},
   keywords = {molybdenum nitride; PVD; vacancies},
   language = {eng},
   issn = {0021-8979},
   journal = {Journal of Applied Physics},
   title = {The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films},
   url = {https://aip.scitation.org/doi/10.1063/1.4966664},
   volume = {120},
   year = {2016}
}

TY  - JOUR
ID  - 1366455
AU  - Klimashin, Fedor F. - Koutná, Nikola - Euchner, Holger - Holec, David - Mayrhofer, Paul H.
PY  - 2016
TI  - The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films
JF  - Journal of Applied Physics
VL  - 120
IS  - 18
SP  - "nestrankovano"
EP  - "nestrankovano"
PB  - AMER INST PHYSICS
SN  - 00218979
KW  - molybdenum nitride
KW  - PVD
KW  - vacancies
UR  - https://aip.scitation.org/doi/10.1063/1.4966664
L2  - https://aip.scitation.org/doi/10.1063/1.4966664
N2  - Based on a combined computational and experimental study, we show that besides the thermodynamically stable beta-MoN0.5 and delta(2)-MoN phases, also metastable gamma-MoNx and its ordered relative gamma'-MoNx can be synthesized by physical vapor deposition. The formation of the NaCl-based gamma-MoNx phase is favored for nitrogen concentrations between 23 and 34 at.% (i.e., x = 0.30-0.53). Higher nitrogen contents (close to the 3:2 stoichiometry, hence, MoN0.67) favor the ordering of the vacancies at the nitrogen sublattice (hence, gamma'-MoNx). The highest hardness of similar to 33 GPa is obtained for single-phase cubic-structured gamma-MoN0.53 coatings, whereas the ordered gamma'-MoN0.67 coatings are slightly softer with a hardness of similar to 28 GPa.
ER  -

KLIMASHIN, Fedor F.; Nikola KOUTNÁ; Holger EUCHNER; David HOLEC and Paul H. MAYRHOFER. The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films. \textit{Journal of Applied Physics}. Melville: AMER INST PHYSICS, 2016, vol.~120, No~18, p.~''nestrankovano'', 10 pp. ISSN~0021-8979. Available from: https://doi.org/10.1063/1.4966664.

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