The impact of nitrogen content and vacancies on structure and
mechanical properties of Mo-N thin films

J 2016

The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films

KLIMASHIN, Fedor F., Nikola KOUTNÁ, Holger EUCHNER, David HOLEC, Paul H. MAYRHOFER et. al.

Základní údaje

Originální název

The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films

Autoři

KLIMASHIN, Fedor F. (643 Rusko), Nikola KOUTNÁ (203 Česká republika, domácí), Holger EUCHNER (276 Německo), David HOLEC (203 Česká republika) a Paul H. MAYRHOFER (40 Rakousko)

Vydání

Journal of Applied Physics, Melville, AMER INST PHYSICS, 2016, 0021-8979

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10302 Condensed matter physics

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

Full Text

Impakt faktor

Impact factor: 2.068

Kód RIV

RIV/00216224:14310/16:00092633

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1063/1.4966664

UT WoS

000388734700023

Klíčová slova anglicky

molybdenum nitride; PVD; vacancies

Štítky

AKR, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 19. 12. 2019 15:45, Mgr. Marie Šípková, DiS.

Anotace

V originále

Based on a combined computational and experimental study, we show that besides the thermodynamically stable beta-MoN0.5 and delta(2)-MoN phases, also metastable gamma-MoNx and its ordered relative gamma'-MoNx can be synthesized by physical vapor deposition. The formation of the NaCl-based gamma-MoNx phase is favored for nitrogen concentrations between 23 and 34 at.% (i.e., x = 0.30-0.53). Higher nitrogen contents (close to the 3:2 stoichiometry, hence, MoN0.67) favor the ordering of the vacancies at the nitrogen sublattice (hence, gamma'-MoNx). The highest hardness of similar to 33 GPa is obtained for single-phase cubic-structured gamma-MoN0.53 coatings, whereas the ordered gamma'-MoN0.67 coatings are slightly softer with a hardness of similar to 28 GPa.

Citovat

KLIMASHIN, Fedor F., Nikola KOUTNÁ, Holger EUCHNER, David HOLEC a Paul H. MAYRHOFER. The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films. Journal of Applied Physics. Melville: AMER INST PHYSICS, 2016, roč. 120, č. 18, s. "nestrankovano", 10 s. ISSN 0021-8979. Dostupné z: https://dx.doi.org/10.1063/1.4966664.

@article{1366455,
   author = {Klimashin, Fedor F. and Koutná, Nikola and Euchner, Holger and Holec, David and Mayrhofer, Paul H.},
   article_location = {Melville},
   article_number = {18},
   doi = {http://dx.doi.org/10.1063/1.4966664},
   keywords = {molybdenum nitride; PVD; vacancies},
   language = {eng},
   issn = {0021-8979},
   journal = {Journal of Applied Physics},
   title = {The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films},
   url = {https://aip.scitation.org/doi/10.1063/1.4966664},
   volume = {120},
   year = {2016}
}

TY  - JOUR
ID  - 1366455
AU  - Klimashin, Fedor F. - Koutná, Nikola - Euchner, Holger - Holec, David - Mayrhofer, Paul H.
PY  - 2016
TI  - The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films
JF  - Journal of Applied Physics
VL  - 120
IS  - 18
SP  - "nestrankovano"
EP  - "nestrankovano"
PB  - AMER INST PHYSICS
SN  - 00218979
KW  - molybdenum nitride
KW  - PVD
KW  - vacancies
UR  - https://aip.scitation.org/doi/10.1063/1.4966664
L2  - https://aip.scitation.org/doi/10.1063/1.4966664
N2  - Based on a combined computational and experimental study, we show that besides the thermodynamically stable beta-MoN0.5 and delta(2)-MoN phases, also metastable gamma-MoNx and its ordered relative gamma'-MoNx can be synthesized by physical vapor deposition. The formation of the NaCl-based gamma-MoNx phase is favored for nitrogen concentrations between 23 and 34 at.% (i.e., x = 0.30-0.53). Higher nitrogen contents (close to the 3:2 stoichiometry, hence, MoN0.67) favor the ordering of the vacancies at the nitrogen sublattice (hence, gamma'-MoNx). The highest hardness of similar to 33 GPa is obtained for single-phase cubic-structured gamma-MoN0.53 coatings, whereas the ordered gamma'-MoN0.67 coatings are slightly softer with a hardness of similar to 28 GPa.
ER  -

KLIMASHIN, Fedor F., Nikola KOUTNÁ, Holger EUCHNER, David HOLEC a Paul H. MAYRHOFER. The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films. \textit{Journal of Applied Physics}. Melville: AMER INST PHYSICS, 2016, roč.~120, č.~18, s.~''nestrankovano'', 10 s. ISSN~0021-8979. Dostupné z: https://dx.doi.org/10.1063/1.4966664.

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