Simultaneous electrical and optical study of spoke rotation,
merging and splitting in HiPIMS plasma

J 2017

Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma

KLEIN, Peter, Francis LOCKWOOD ESTRIN, Jaroslav HNILICA, Petr VAŠINA, James BRADLEY et. al.

Základní údaje

Originální název

Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma

Autoři

KLEIN, Peter (703 Slovensko, domácí), Francis LOCKWOOD ESTRIN (826 Velká Británie a Severní Irsko), Jaroslav HNILICA (203 Česká republika, domácí), Petr VAŠINA (203 Česká republika, garant, domácí) a James BRADLEY (826 Velká Británie a Severní Irsko)

Vydání

Journal of Physics D: Applied Physics, Bristol, IOP Publishing, 2017, 0022-3727

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Impakt faktor

Impact factor: 2.373

Kód RIV

RIV/00216224:14310/17:00094594

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1088/1361-6463/50/1/015209

UT WoS

000389213100001

Klíčová slova anglicky

magnetron sputtering; HiPIMS; spokes; spoke model

Štítky

NZ, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 11. 4. 2018 21:59, Ing. Nicole Zrilić

Anotace

V originále

To gain more information on the temporal and spatial behaviour of self-organized spoke structures in HiPIMS plasmas, a correlation between the broadband optical image of an individual spoke (taken over 200 ns) and the current it delivers to the target has been made for a range of magnetron operating conditions. As a spoke passes over a set of embedded probes in the niobium cathode target, a distinct modulation in the local current density is observed, (typically up to twice the average value), matching very well the radially integrated optical emission intensities (obtained remotely with an ICCD camera). The dual diagnostic system allows the merging and splitting of a set of spokes to be studied as they rotate. It is observed that in the merger of two spokes, the trailing spoke maintains its velocity while the leading spoke either decreases its velocity or increases its azimuthal length. In the spoke splitting process, the total charge collected by an embedded probe is conserved. A simple phenomenological model is developed that relates the spoke mode number m to the spoke dimensions, spoke velocity and gas atom velocity. The results are discussed in the context of the observations of spoke dynamics made by Hecimovic et al (2015 Plasma Sources Sci. Technol. 24 045005).

Návaznosti

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GA15-00863S, projekt VaV

Název: Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace

Investor: Grantová agentura ČR, Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

KLEIN, Peter, Francis LOCKWOOD ESTRIN, Jaroslav HNILICA, Petr VAŠINA a James BRADLEY. Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma. Journal of Physics D: Applied Physics. Bristol: IOP Publishing, 2017, roč. 50, č. 1, s. nestránkováno, 10 s. ISSN 0022-3727. Dostupné z: https://dx.doi.org/10.1088/1361-6463/50/1/015209.

@article{1366538,
   author = {Klein, Peter and Lockwood Estrin, Francis and Hnilica, Jaroslav and Vašina, Petr and Bradley, James},
   article_location = {Bristol},
   article_number = {1},
   doi = {http://dx.doi.org/10.1088/1361-6463/50/1/015209},
   keywords = {magnetron sputtering; HiPIMS; spokes; spoke model},
   language = {eng},
   issn = {0022-3727},
   journal = {Journal of Physics D: Applied Physics},
   title = {Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma},
   volume = {50},
   year = {2017}
}

TY  - JOUR
ID  - 1366538
AU  - Klein, Peter - Lockwood Estrin, Francis - Hnilica, Jaroslav - Vašina, Petr - Bradley, James
PY  - 2017
TI  - Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma
JF  - Journal of Physics D: Applied Physics
VL  - 50
IS  - 1
SP  - nestránkováno
EP  - nestránkováno
PB  - IOP Publishing
SN  - 00223727
KW  - magnetron sputtering
KW  - HiPIMS
KW  - spokes
KW  - spoke model
N2  - To gain more information on the temporal and spatial behaviour of self-organized spoke structures in HiPIMS plasmas, a correlation between the broadband optical image of an individual spoke (taken over 200 ns) and the current it delivers to the target has been made for a range of magnetron operating conditions. As a spoke passes over a set of embedded probes in the niobium cathode target, a distinct modulation in the local current density is observed, (typically up to twice the average value), matching very well the radially integrated optical emission intensities (obtained remotely with an ICCD camera). The dual diagnostic system allows the merging and splitting of a set of spokes to be studied as they rotate. It is observed that in the merger of two spokes, the trailing spoke maintains its velocity while the leading spoke either decreases its velocity or increases its azimuthal length. In the spoke splitting process, the total charge collected by an embedded probe is conserved. A simple phenomenological model is developed that relates the spoke mode number m to the spoke dimensions, spoke velocity and gas atom velocity. The results are discussed in the context of the observations of spoke dynamics made by Hecimovic et al (2015 Plasma Sources Sci. Technol. 24 045005).
ER  -

KLEIN, Peter, Francis LOCKWOOD ESTRIN, Jaroslav HNILICA, Petr VAŠINA a James BRADLEY. Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma. \textit{Journal of Physics D: Applied Physics}. Bristol: IOP Publishing, 2017, roč.~50, č.~1, s.~nestránkováno, 10 s. ISSN~0022-3727. Dostupné z: https://dx.doi.org/10.1088/1361-6463/50/1/015209.

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