J 2017

Wide-pressure-range coplanar dielectric barrier discharge: Operational characterisation of a versatile plasma source

ČECH, Jan, Zdeněk BONAVENTURA, Pavel SŤAHEL, Miroslav ZEMÁNEK, Hana DVOŘÁKOVÁ et. al.

Basic information

Original name

Wide-pressure-range coplanar dielectric barrier discharge: Operational characterisation of a versatile plasma source

Authors

ČECH, Jan (203 Czech Republic, guarantor, belonging to the institution), Zdeněk BONAVENTURA (203 Czech Republic, belonging to the institution), Pavel SŤAHEL (203 Czech Republic, belonging to the institution), Miroslav ZEMÁNEK (203 Czech Republic, belonging to the institution), Hana DVOŘÁKOVÁ (203 Czech Republic, belonging to the institution) and Mirko ČERNÁK (703 Slovakia, belonging to the institution)

Edition

Physics of Plasmas, MELVILLE, AMER INST PHYSICS, 2017, 1070-664X

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 1.941

RIV identification code

RIV/00216224:14310/17:00094621

Organization unit

Faculty of Science

UT WoS

000395395100076

Keywords in English

dielectric barrier discharge; coplanar; wide pressure range; low pressure; paschen; iccd

Tags

Změněno: 13/4/2018 09:30, Ing. Nicole Zrilić

Abstract

V originále

Many plasma applications could benefit from the versatile plasma source operable at a wide-pressure-range, e.g., from the fraction of Pa to the super-atmospheric conditions. In this paper, the basic characteristics of wide-pressure-range plasma source based on the coplanar dielectric barrier discharge is given. The operational characteristics of this plasma source were measured in nitrogen at pressures ranging from 10^1Pa (resp. 10^-4Pa) to 10^5Pa. Measurements of the plasma geometry, breakdown voltage, and micro-discharges' behaviour revealed three operational regimes of this plasma source: "high pressure," "transitional" and "low-pressure" with vague boundaries at the pressures of approx. 10 kPa and 1 kPa. It was found that the plasma layer of coplanar dielectric barrier discharge could be expanded up to several centimetres to the half-space above the planar dielectric barrier when the gas pressure is reduced below 1 kPa, which provides an outstanding space to tailor the source for the specific applications. The proposed model of an effective gap distance in the Paschen breakdown criterion enabled us to explain the discharge behaviour fitting the experimental breakdown voltage data in the whole studied pressure range. Under the filament-forming conditions, i.e., at the pressure range from approx. 1-100 kPa, the active plasma volume could be varied through the micro-discharges' lateral thickness scaling with the inverse of the square-root of the gas pressure.

Links

ED2.1.00/03.0086, research and development project
Name: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy
GA13-24635S, research and development project
Name: Spektroskopické studium rekombinace povrchového náboje v dielektrických bariérových výbojích
Investor: Czech Science Foundation
LO1411, research and development project
Name: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)
Investor: Ministry of Education, Youth and Sports of the CR