Simultaneous determination of optical constants, local
thickness and roughness of ZnSe thin films by imaging
spectroscopic reflectometry

J 2016

Simultaneous determination of optical constants, local thickness and roughness of ZnSe thin films by imaging spectroscopic reflectometry

NEČAS, David, Ivan OHLÍDAL, Daniel FRANTA, M. OHLIDAL, J. VODAK et. al.

Základní údaje

Originální název

Simultaneous determination of optical constants, local thickness and roughness of ZnSe thin films by imaging spectroscopic reflectometry

Autoři

NEČAS, David (203 Česká republika, garant, domácí), Ivan OHLÍDAL (203 Česká republika, domácí), Daniel FRANTA (203 Česká republika, domácí), M. OHLIDAL (203 Česká republika) a J. VODAK (203 Česká republika)

Vydání

Journal of Optics, Bristol, IOP Publishing, 2016, 2040-8978

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10306 Optics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 1.741

Kód RIV

RIV/00216224:14740/16:00087663

Organizační jednotka

Středoevropský technologický institut

DOI

http://dx.doi.org/10.1088/2040-8978/18/1/015401

UT WoS

000367187000025

Klíčová slova anglicky

thin films; roughness; scalar diffraction theory; spectrophotometry; imaging techniques; zinc selenide; reflectometry

Štítky

rivok

Změněno: 9. 3. 2017 11:03, Mgr. Eva Špillingová

Anotace

V originále

A rough non-uniform ZnSe thin film on a GaAs substrate is optically characterised using imaging spectroscopic reflectometry (ISR) in the visible, UV and near IR region, applied as a standalone technique. A global-local data processing algorithm is used to fit spectra from all pixels together and simultaneously determine maps of the local film thickness, roughness and overlayer thickness as well as spectral dependencies of film optical constants determined for the sample as a whole. The roughness of the film upper boundary is modelled using scalar diffraction theory (SDT), for which an improved calculation method is developed to process the large quantities of experimental data produced by ISR efficiently. This method avoids expensive operations by expressing the series obtained from SDT using a double recurrence relation and it is shown that it essentially eliminates the necessity for any speed-precision trade-offs in the SDT calculations. Comparison of characterisation results with the literature and other techniques shows the ability of multi-pixel processing to improve the stability and reliability of least-squares data fitting and demonstrates that standalone ISR, coupled with suitable data processing methods, is viable as a characterisation technique, even for thin films that are relatively far from ideal and require complex modelling.

Návaznosti

ED1.1.00/02.0068, projekt VaV

Název: CEITEC - central european institute of technology

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

TA02010784, projekt VaV

Název: Optimalizace vrstevnatých systémů používaných v optickém průmyslu

Investor: Technologická agentura ČR, Optimalizace vrstevnatých systémů používaných v optickém průmyslu

Citovat

NEČAS, David, Ivan OHLÍDAL, Daniel FRANTA, M. OHLIDAL a J. VODAK. Simultaneous determination of optical constants, local thickness and roughness of ZnSe thin films by imaging spectroscopic reflectometry. Journal of Optics. Bristol: IOP Publishing, 2016, roč. 18, č. 1, s. nestránkováno, 10 s. ISSN 2040-8978. Dostupné z: https://dx.doi.org/10.1088/2040-8978/18/1/015401.

@article{1375048,
   author = {Nečas, David and Ohlídal, Ivan and Franta, Daniel and Ohlidal, M. and Vodak, J.},
   article_location = {Bristol},
   article_number = {1},
   doi = {http://dx.doi.org/10.1088/2040-8978/18/1/015401},
   keywords = {thin films; roughness; scalar diffraction theory; spectrophotometry; imaging techniques; zinc selenide; reflectometry},
   language = {eng},
   issn = {2040-8978},
   journal = {Journal of Optics},
   title = {Simultaneous determination of optical constants, local thickness and roughness of ZnSe thin films by imaging spectroscopic reflectometry},
   url = {http://iopscience.iop.org/article/10.1088/2040-8978/18/1/015401/meta},
   volume = {18},
   year = {2016}
}

TY  - JOUR
ID  - 1375048
AU  - Nečas, David - Ohlídal, Ivan - Franta, Daniel - Ohlidal, M. - Vodak, J.
PY  - 2016
TI  - Simultaneous determination of optical constants, local thickness and roughness of ZnSe thin films by imaging spectroscopic reflectometry
JF  - Journal of Optics
VL  - 18
IS  - 1
SP  - nestránkováno
EP  - nestránkováno
PB  - IOP Publishing
SN  - 20408978
KW  - thin films
KW  - roughness
KW  - scalar diffraction theory
KW  - spectrophotometry
KW  - imaging techniques
KW  - zinc selenide
KW  - reflectometry
UR  - http://iopscience.iop.org/article/10.1088/2040-8978/18/1/015401/meta
L2  - http://iopscience.iop.org/article/10.1088/2040-8978/18/1/015401/meta
N2  - A rough non-uniform ZnSe thin film on a GaAs substrate is optically characterised using imaging spectroscopic reflectometry (ISR) in the visible, UV and near IR region, applied as a standalone technique. A global-local data processing algorithm is used to fit spectra from all pixels together and simultaneously determine maps of the local film thickness, roughness and overlayer thickness as well as spectral dependencies of film optical constants determined for the sample as a whole. The roughness of the film upper boundary is modelled using scalar diffraction theory (SDT), for which an improved calculation method is developed to process the large quantities of experimental data produced by ISR efficiently. This method avoids expensive operations by expressing the series obtained from SDT using a double recurrence relation and it is shown that it essentially eliminates the necessity for any speed-precision trade-offs in the SDT calculations. Comparison of characterisation results with the literature and other techniques shows the ability of multi-pixel processing to improve the stability and reliability of least-squares data fitting and demonstrates that standalone ISR, coupled with suitable data processing methods, is viable as a characterisation technique, even for thin films that are relatively far from ideal and require complex modelling.
ER  -

NEČAS, David, Ivan OHLÍDAL, Daniel FRANTA, M. OHLIDAL a J. VODAK. Simultaneous determination of optical constants, local thickness and roughness of ZnSe thin films by imaging spectroscopic reflectometry. \textit{Journal of Optics}. Bristol: IOP Publishing, 2016, roč.~18, č.~1, s.~nestránkováno, 10 s. ISSN~2040-8978. Dostupné z: https://dx.doi.org/10.1088/2040-8978/18/1/015401.

Podrobný výpis o publikaci