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@article{1376392,
author = {Siefke, Thomas and Kroker, Stefanie and Pfeiffer, Kristin and Puffky, Oliver and Dietrich, Kay and Franta, Daniel and Ohlídal, Ivan and Szeghalmi, Adriana and Kley, ErnstandBernhard and Tünnermann, Andreas},
article_number = {11},
doi = {http://dx.doi.org/10.1002/adom.201600250},
keywords = {Wire Grid Polarizers; Dispersion model; Films; Lithography},
language = {eng},
issn = {2195-1071},
journal = {Advanced Optical Materials},
title = {Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range},
url = {http://onlinelibrary.wiley.com/doi/10.1002/adom.201600250/abstract},
volume = {4},
year = {2016}
}
TY - JOUR
ID - 1376392
AU - Siefke, Thomas - Kroker, Stefanie - Pfeiffer, Kristin - Puffky, Oliver - Dietrich, Kay - Franta, Daniel - Ohlídal, Ivan - Szeghalmi, Adriana - Kley, Ernst-Bernhard - Tünnermann, Andreas
PY - 2016
TI - Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
JF - Advanced Optical Materials
VL - 4
IS - 11
SP - 1780-1786
EP - 1780-1786
SN - 21951071
KW - Wire Grid Polarizers
KW - Dispersion model
KW - Films
KW - Lithography
UR - http://onlinelibrary.wiley.com/doi/10.1002/adom.201600250/abstract
N2 - Wire grid polarizers (WGPs), periodic nano-optical metasurfaces, are convenient polarizing elements for many optical applications. However, they are still inadequate in the deep ultraviolet spectral range. It is shown that to achieve high performance ultraviolet WGPs a material with large absolute value of the complex permittivity and extinction coefficient at the wavelength of interest has to be utilized. This requirement is compared to refractive index models considering intraband and interband absorption processes. It is elucidated why the extinction ratio of metallic WGPs intrinsically humble in the deep ultraviolet, whereas wide bandgap semiconductors are superior material candidates in this spectral range. To demonstrate this, the design, fabrication, and optical characterization of a titanium dioxide WGP are presented. At a wavelength of 193 nm an unprecedented extinction ratio of 384 and a transmittance of 10% is achieved.
ER -
SIEFKE, Thomas, Stefanie KROKER, Kristin PFEIFFER, Oliver PUFFKY, Kay DIETRICH, Daniel FRANTA, Ivan OHLÍDAL, Adriana SZEGHALMI, Ernst-Bernhard KLEY and Andreas TÜNNERMANN. Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range (Materiály pro polarizátory z drátěných mřížek posouvající aplikační omezení dále do ultrafialové spektrální oblasti). \textit{Advanced Optical Materials}. vol.~4, No~11, p.~1780-1786. ISSN~2195-1071. doi:10.1002/adom.201600250. 2016.
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