KLEIN, Peter, Jaroslav HNILICA, Zdeněk HUBIČKA, Martin ČADA, Marta ŠLAPANSKÁ, Miroslav ZEMÁNEK a Petr VAŠINA. Cathode voltage and discharge current oscillations in HiPIMS. Plasma Sources Science and Technology. Bristol: IOP Publishing LTD, 2017, roč. 26, č. 5, s. nestránkováno, 12 s. ISSN 0963-0252. Dostupné z: https://dx.doi.org/10.1088/1361-6595/aa62ee. |
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@article{1378966, author = {Klein, Peter and Hnilica, Jaroslav and Hubička, Zdeněk and Čada, Martin and Šlapanská, Marta and Zemánek, Miroslav and Vašina, Petr}, article_location = {Bristol}, article_number = {5}, doi = {http://dx.doi.org/10.1088/1361-6595/aa62ee}, keywords = {HiPIMS; voltage and current oscillations; spokes}, language = {eng}, issn = {0963-0252}, journal = {Plasma Sources Science and Technology}, title = {Cathode voltage and discharge current oscillations in HiPIMS}, url = {http://iopscience.iop.org/article/10.1088/1361-6595/aa62ee}, volume = {26}, year = {2017} }
TY - JOUR ID - 1378966 AU - Klein, Peter - Hnilica, Jaroslav - Hubička, Zdeněk - Čada, Martin - Šlapanská, Marta - Zemánek, Miroslav - Vašina, Petr PY - 2017 TI - Cathode voltage and discharge current oscillations in HiPIMS JF - Plasma Sources Science and Technology VL - 26 IS - 5 SP - nestránkováno EP - nestránkováno PB - IOP Publishing LTD SN - 09630252 KW - HiPIMS KW - voltage and current oscillations KW - spokes UR - http://iopscience.iop.org/article/10.1088/1361-6595/aa62ee L2 - http://iopscience.iop.org/article/10.1088/1361-6595/aa62ee N2 - This paper reports on the oscillations both on the cathode voltage and on the discharge current which emerged suddenly and simultaneously during a high-power impulse magnetron sputtering pulse. Detailed experiments identified the pressure and the discharge current ranges to detect these oscillations. The oscillations originated from the magnetized plasma and their frequency ranged from 225 kHz to 400 kHz depending on the experimental conditions. Simultaneous measurement of both oscillations and spokes was conducted to find mutual correlations. The oscillations always accompanied the spokes and no particular conditions to detect oscillations in the absence of spokes were found. The oscillations were not caused by the rotational motion of the spokes but emerged when a certain threshold amount of spokes was overreached. ER -
KLEIN, Peter, Jaroslav HNILICA, Zdeněk HUBIČKA, Martin ČADA, Marta ŠLAPANSKÁ, Miroslav ZEMÁNEK a Petr VAŠINA. Cathode voltage and discharge current oscillations in HiPIMS. \textit{Plasma Sources Science and Technology}. Bristol: IOP Publishing LTD, 2017, roč.~26, č.~5, s.~nestránkováno, 12 s. ISSN~0963-0252. Dostupné z: https://dx.doi.org/10.1088/1361-6595/aa62ee.
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