FALUB, Claudiu V., Hartmut ROHRMANN, Martin BLESS, Mojmír MEDUŇA, Miguel MARIONI, Daniel SCHNEIDER, Jan H. RICHTER a Marco PADRUN. Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications. AIP Advances. MELVILLE: AMER INST PHYSICS, 2017, roč. 7, č. 5, s. nestránkováno, 7 s. ISSN 2158-3226. Dostupné z: https://dx.doi.org/10.1063/1.4973945. |
Další formáty:
BibTeX
LaTeX
RIS
@article{1387381, author = {Falub, Claudiu V. and Rohrmann, Hartmut and Bless, Martin and Meduňa, Mojmír and Marioni, Miguel and Schneider, Daniel and Richter, Jan H. and Padrun, Marco}, article_location = {MELVILLE}, article_number = {5}, doi = {http://dx.doi.org/10.1063/1.4973945}, keywords = {ferromagnetic-resonance frequency; on-chip inductors; x-ray-scattering; thin-films; roughness; anisotropy; band}, language = {eng}, issn = {2158-3226}, journal = {AIP Advances}, title = {Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications}, url = {http://aip.scitation.org/doi/abs/10.1063/1.4973945}, volume = {7}, year = {2017} }
TY - JOUR ID - 1387381 AU - Falub, Claudiu V. - Rohrmann, Hartmut - Bless, Martin - Meduňa, Mojmír - Marioni, Miguel - Schneider, Daniel - Richter, Jan H. - Padrun, Marco PY - 2017 TI - Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications JF - AIP Advances VL - 7 IS - 5 SP - nestránkováno EP - nestránkováno PB - AMER INST PHYSICS SN - 21583226 KW - ferromagnetic-resonance frequency KW - on-chip inductors KW - x-ray-scattering KW - thin-films KW - roughness KW - anisotropy KW - band UR - http://aip.scitation.org/doi/abs/10.1063/1.4973945 L2 - http://aip.scitation.org/doi/abs/10.1063/1.4973945 N2 - Soft magnetic Ni78.5Fe21.5, Co91.5Ta4.5Zr4 and Fe52Co28B20 thin films laminated with SiO2, Al2O3, AlN, and Ta2O5 dielectric interlayers were deposited on 8” Si wafers using DC, pulsed DC and RF cathodes in the industrial, high-throughput Evatec LLS-EVO-II magnetron sputtering system. ER -
FALUB, Claudiu V., Hartmut ROHRMANN, Martin BLESS, Mojmír MEDUŇA, Miguel MARIONI, Daniel SCHNEIDER, Jan H. RICHTER a Marco PADRUN. Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications. \textit{AIP Advances}. MELVILLE: AMER INST PHYSICS, 2017, roč.~7, č.~5, s.~nestránkováno, 7 s. ISSN~2158-3226. Dostupné z: https://dx.doi.org/10.1063/1.4973945.
|