Modelling of the gas flow and plasma co-polymerization of two
monomers in an atmospheric-pressure dielectric barrier
discharge

J 2017

Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge

OBRUSNÍK, Adam, Petr JELÍNEK a Lenka ZAJÍČKOVÁ

Základní údaje

Originální název

Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge

Autoři

OBRUSNÍK, Adam (203 Česká republika, domácí), Petr JELÍNEK (203 Česká republika, domácí) a Lenka ZAJÍČKOVÁ (203 Česká republika, garant, domácí)

Vydání

SURFACE & COATINGS TECHNOLOGY, LAUSANNE, ELSEVIER SCIENCE SA, 2017, 0257-8972

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 2.906

Kód RIV

RIV/00216224:14740/17:00097537

Organizační jednotka

Středoevropský technologický institut

DOI

http://dx.doi.org/10.1016/j.surfcoat.2016.10.068

UT WoS

000397696400022

Klíčová slova anglicky

Plasma polymerization; Atmospheric pressure; Dielectric barrier discharge; Deposition model; Gas flow model

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 20. 3. 2018 21:33, doc. Mgr. Lenka Zajíčková, Ph.D.

Anotace

V originále

We present a combined experimental and numerical study of plasma co-polymerization of maleic anhydride and acetylene in an atmospheric-pressure dielectric-barrier discharge. It combines a three-dimensional model of the gas dynamics in close-to-real geometry with a semi-analytical model of the deposition which reduces the unknown plasma chemistry into several averaged species. The unknown coefficients of the model are found by correlating it with measurements of film thickness at various deposition conditions. Even though the model is calibrated only based on spatially-resolved thickness, it is proven using FT-IR that it also makes valid predictions regarding the film composition. The predictive capabilities of the model are also tested on independent experiments, illustrating that the model retains its predictive capabilities even outside of the calibration region. The work aims not only to provide more insight into the specific deposition process but it also illustrates efficient use of numerical modelling in process control and design. (C) 2016 Elsevier B.V. All rights reserved.

Návaznosti

LQ1601, projekt VaV

Název: CEITEC 2020 (Akronym: CEITEC2020)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, CEITEC 2020

Citovat

OBRUSNÍK, Adam, Petr JELÍNEK a Lenka ZAJÍČKOVÁ. Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge. SURFACE & COATINGS TECHNOLOGY. LAUSANNE: ELSEVIER SCIENCE SA, 2017, roč. 314, MAR, s. 139-147. ISSN 0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2016.10.068.

@article{1389293,
   author = {Obrusník, Adam and Jelínek, Petr and Zajíčková, Lenka},
   article_location = {LAUSANNE},
   article_number = {MAR},
   doi = {http://dx.doi.org/10.1016/j.surfcoat.2016.10.068},
   keywords = {Plasma polymerization; Atmospheric pressure; Dielectric barrier discharge; Deposition model; Gas flow model},
   language = {eng},
   issn = {0257-8972},
   journal = {SURFACE & COATINGS TECHNOLOGY},
   title = {Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge},
   url = {https://www.sciencedirect.com/science/article/pii/S0257897216310659?via%3Dihub},
   volume = {314},
   year = {2017}
}

TY  - JOUR
ID  - 1389293
AU  - Obrusník, Adam - Jelínek, Petr - Zajíčková, Lenka
PY  - 2017
TI  - Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge
JF  - SURFACE & COATINGS TECHNOLOGY
VL  - 314
IS  - MAR
SP  - 139-147
EP  - 139-147
PB  - ELSEVIER SCIENCE SA
SN  - 02578972
KW  - Plasma polymerization
KW  - Atmospheric pressure
KW  - Dielectric barrier discharge
KW  - Deposition model
KW  - Gas flow model
UR  - https://www.sciencedirect.com/science/article/pii/S0257897216310659?via%3Dihub
L2  - https://www.sciencedirect.com/science/article/pii/S0257897216310659?via%3Dihub
N2  - We present a combined experimental and numerical study of plasma co-polymerization of maleic anhydride and acetylene in an atmospheric-pressure dielectric-barrier discharge. It combines a three-dimensional model of the gas dynamics in close-to-real geometry with a semi-analytical model of the deposition which reduces the unknown plasma chemistry into several averaged species. The unknown coefficients of the model are found by correlating it with measurements of film thickness at various deposition conditions. Even though the model is calibrated only based on spatially-resolved thickness, it is proven using FT-IR that it also makes valid predictions regarding the film composition. The predictive capabilities of the model are also tested on independent experiments, illustrating that the model retains its predictive capabilities even outside of the calibration region. The work aims not only to provide more insight into the specific deposition process but it also illustrates efficient use of numerical modelling in process control and design. (C) 2016 Elsevier B.V. All rights reserved.
ER  -

OBRUSNÍK, Adam, Petr JELÍNEK a Lenka ZAJÍČKOVÁ. Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge. \textit{SURFACE \&{} COATINGS TECHNOLOGY}. LAUSANNE: ELSEVIER SCIENCE SA, 2017, roč.~314, MAR, s.~139-147. ISSN~0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2016.10.068.

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