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@proceedings{1395672,
author = {Faltýnek, Jan and Kudrle, Vít and Tesař, Jakub and Tálský, Antonín and Volfová, Martina},
booktitle = {23rd International Symposium on Plasma Chemistry},
keywords = {numerical model, resonator, microwave, Q-factor, plasma density},
language = {eng},
title = {Numerical enhancement of the microwave cavity method for plasma density measurement},
url = {http://www.ispc-conference.org/ispcproc/ispc23/264.pdf},
year = {2017}
}
TY - CONF
ID - 1395672
AU - Faltýnek, Jan - Kudrle, Vít - Tesař, Jakub - Tálský, Antonín - Volfová, Martina
PY - 2017
TI - Numerical enhancement of the microwave cavity method for plasma density measurement
KW - numerical model, resonator, microwave, Q-factor, plasma density
UR - http://www.ispc-conference.org/ispcproc/ispc23/264.pdf
N2 - Microwave resonator method is well established and sensitive technique of plasma density measurements, especially in low pressure plasmas. The traditional Slater solution of the electromagnetic field perturbation (suitable for small perturbations only) is replaced with more accurate, yet comprehensible numerical model, also addressing further phenomena such as the resonator eigenmodes and the stability of the dominant mode.
ER -
FALTÝNEK, Jan, Vít KUDRLE, Jakub TESAŘ, Antonín TÁLSKÝ a Martina VOLFOVÁ. Numerical enhancement of the microwave cavity method for plasma density measurement. In \textit{23rd International Symposium on Plasma Chemistry}. 2017.
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