Enhancement of electrical properties of flexible ITO/PET by
atmospheric pressure roll-to-roll plasma

J 2018

Enhancement of electrical properties of flexible ITO/PET by atmospheric pressure roll-to-roll plasma

SHEKARGOFTAR, Masoud, Richard KRUMPOLEC a Tomáš HOMOLA

Základní údaje

Originální název

Enhancement of electrical properties of flexible ITO/PET by atmospheric pressure roll-to-roll plasma

Autoři

SHEKARGOFTAR, Masoud (364 Írán, garant, domácí), Richard KRUMPOLEC (703 Slovensko, domácí) a Tomáš HOMOLA (703 Slovensko, domácí)

Vydání

Materials Science in Semiconductor Processing, Netherlands, Elsevier, 2018, 1369-8001

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 2.722

Kód RIV

RIV/00216224:14310/18:00102122

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1016/j.mssp.2017.11.022

UT WoS

000424934600013

Klíčová slova anglicky

Roll-to-roll; Plasma treatment; Diffuse plasma; Work function; Flexible electronics; Surface cleaning

Příznaky

Recenzováno

Změněno: 4. 3. 2019 15:41, doc. RNDr. Tomáš Homola, PhD.

Anotace

V originále

Flexible materials can significantly reduce the cost of the electronic devices because they can be manufactured by large-area roll-to-roll (R2R) processing. In this work, R2R atmospheric pressure plasma was used to modify flexible indium-tin-oxide films on polyethylene terephthalate foil (ITO/PET). Plasma treatment was performed in different feed gases consisting of various ratio between nitrogen and oxygen. A range of experimental techniques were used to study surface properties of ITO/PET, including X-ray and Ultraviolet photoelectron spectroscopies, four-point probe, Atomic force microscopy and UV–Vis measurement. We found that R2R plasma treatment decreased carbon contamination and increased the number of oxygen vacancies on the surface, whereas the ratio between indium and tin remained constant. UPS showed an increase in the work function from 3.9 eV for untreated sample to 5.1 eV for sample treated in plasma for very short time of 2 s.

Návaznosti

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

SHEKARGOFTAR, Masoud, Richard KRUMPOLEC a Tomáš HOMOLA. Enhancement of electrical properties of flexible ITO/PET by atmospheric pressure roll-to-roll plasma. Materials Science in Semiconductor Processing. Netherlands: Elsevier, 2018, roč. 75, N/A, s. 95-102. ISSN 1369-8001. Dostupné z: https://dx.doi.org/10.1016/j.mssp.2017.11.022.

@article{1397342,
   author = {Shekargoftar, Masoud and Krumpolec, Richard and Homola, Tomáš},
   article_location = {Netherlands},
   article_number = {N/A},
   doi = {http://dx.doi.org/10.1016/j.mssp.2017.11.022},
   keywords = {Roll-to-roll; Plasma treatment; Diffuse plasma; Work function; Flexible electronics; Surface cleaning},
   language = {eng},
   issn = {1369-8001},
   journal = {Materials Science in Semiconductor Processing},
   title = {Enhancement of electrical properties of flexible ITO/PET by atmospheric pressure roll-to-roll plasma},
   url = {https://www.sciencedirect.com/science/article/pii/S1369800117319601},
   volume = {75},
   year = {2018}
}

TY  - JOUR
ID  - 1397342
AU  - Shekargoftar, Masoud - Krumpolec, Richard - Homola, Tomáš
PY  - 2018
TI  - Enhancement of electrical properties of flexible ITO/PET by atmospheric pressure roll-to-roll plasma
JF  - Materials Science in Semiconductor Processing
VL  - 75
IS  - N/A
SP  - 95-102
EP  - 95-102
PB  - Elsevier
SN  - 13698001
KW  - Roll-to-roll
KW  - Plasma treatment
KW  - Diffuse plasma
KW  - Work function
KW  - Flexible electronics
KW  - Surface cleaning
UR  - https://www.sciencedirect.com/science/article/pii/S1369800117319601
L2  - https://www.sciencedirect.com/science/article/pii/S1369800117319601
N2  - Flexible materials can significantly reduce the cost of the electronic devices because they can be manufactured by large-area roll-to-roll (R2R) processing. In this work, R2R atmospheric pressure plasma was used to modify flexible indium-tin-oxide films on polyethylene terephthalate foil (ITO/PET). Plasma treatment was performed in different feed gases consisting of various ratio between nitrogen and oxygen. A range of experimental techniques were used to study surface properties of ITO/PET, including X-ray and Ultraviolet photoelectron spectroscopies, four-point probe, Atomic force microscopy and UV–Vis measurement. We found that R2R plasma treatment decreased carbon contamination and increased the number of oxygen vacancies on the surface, whereas the ratio between indium and tin remained constant. UPS showed an increase in the work function from 3.9 eV for untreated sample to 5.1 eV for sample treated in plasma for very short time of 2 s.
ER  -

SHEKARGOFTAR, Masoud, Richard KRUMPOLEC a Tomáš HOMOLA. Enhancement of electrical properties of flexible ITO/PET by atmospheric pressure roll-to-roll plasma. \textit{Materials Science in Semiconductor Processing}. Netherlands: Elsevier, 2018, roč.~75, N/A, s.~95-102. ISSN~1369-8001. Dostupné z: https://dx.doi.org/10.1016/j.mssp.2017.11.022.

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