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@proceedings{1398317, author = {Šlapanská, Marta and Hecimovic, Ante and Breilmann, Wolfgang and Hnilica, Jaroslav and Vašina, Petr and von Keudell, Achim}, booktitle = {Sixteenth International Conference on Reactive Sputter Deposition 2017}, keywords = {HiPIMS; spokes; chromium; flat probe; optical emission spectroscopy; mass spectrometry}, language = {eng}, isbn = {978-80-261-0754-5}, title = {Transition from spokes into a homogeneous plasma in HiPIMS discharge}, year = {2017} }
TY - CONF ID - 1398317 AU - Šlapanská, Marta - Hecimovic, Ante - Breilmann, Wolfgang - Hnilica, Jaroslav - Vašina, Petr - von Keudell, Achim PY - 2017 TI - Transition from spokes into a homogeneous plasma in HiPIMS discharge SN - 9788026107545 KW - HiPIMS KW - spokes KW - chromium KW - flat probe KW - optical emission spectroscopy KW - mass spectrometry N2 - The transition from self-organized plasma into spokes to a homogeneous plasma was studied. In the experiment, the 51-mm-diameter chromium target was used. The transition was investigated by simple biased flat probe, mass spectrometry (MS) and optical emission spectroscopy (OES). ER -
ŠLAPANSKÁ, Marta, Ante HECIMOVIC, Wolfgang BREILMANN, Jaroslav HNILICA, Petr VAŠINA a Achim VON KEUDELL. Transition from spokes into a homogeneous plasma in HiPIMS discharge. In \textit{Sixteenth International Conference on Reactive Sputter Deposition 2017}. 2017. ISBN~978-80-261-0754-5.
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