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@proceedings{1398317,
author = {Šlapanská, Marta and Hecimovic, Ante and Breilmann, Wolfgang and Hnilica, Jaroslav and Vašina, Petr and von Keudell, Achim},
booktitle = {Sixteenth International Conference on Reactive Sputter Deposition 2017},
keywords = {HiPIMS; spokes; chromium; flat probe; optical emission spectroscopy; mass spectrometry},
language = {eng},
isbn = {978-80-261-0754-5},
title = {Transition from spokes into a homogeneous plasma in HiPIMS discharge},
year = {2017}
}
TY - CONF
ID - 1398317
AU - Šlapanská, Marta - Hecimovic, Ante - Breilmann, Wolfgang - Hnilica, Jaroslav - Vašina, Petr - von Keudell, Achim
PY - 2017
TI - Transition from spokes into a homogeneous plasma in HiPIMS discharge
SN - 9788026107545
KW - HiPIMS
KW - spokes
KW - chromium
KW - flat probe
KW - optical emission spectroscopy
KW - mass spectrometry
N2 - The transition from self-organized plasma into spokes to a homogeneous plasma was studied. In the experiment, the 51-mm-diameter chromium target was used. The transition was investigated by simple biased flat probe, mass spectrometry (MS) and optical emission spectroscopy (OES).
ER -
ŠLAPANSKÁ, Marta, Ante HECIMOVIC, Wolfgang BREILMANN, Jaroslav HNILICA, Petr VAŠINA a Achim VON KEUDELL. Transition from spokes into a homogeneous plasma in HiPIMS discharge. In \textit{Sixteenth International Conference on Reactive Sputter Deposition 2017}. 2017. ISBN~978-80-261-0754-5.
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