2017
Report on spoke rotation, merging and splitting in HiPIMS plasma
KLEIN, Peter; Jaroslav HNILICA; Francis LOCKWOOD ESTRIN; Petr VAŠINA; James W. BRADLEY et. al.Basic information
Original name
Report on spoke rotation, merging and splitting in HiPIMS plasma
Authors
KLEIN, Peter (703 Slovakia, belonging to the institution); Jaroslav HNILICA (203 Czech Republic, belonging to the institution); Francis LOCKWOOD ESTRIN (826 United Kingdom of Great Britain and Northern Ireland); Petr VAŠINA (203 Czech Republic, guarantor, belonging to the institution) and James W. BRADLEY (826 United Kingdom of Great Britain and Northern Ireland)
Edition
16th International Conference on Reactive Sputter Deposition, 2017
Other information
Language
English
Type of outcome
Conference abstract
Field of Study
10305 Fluids and plasma physics
Country of publisher
Czech Republic
Confidentiality degree
is not subject to a state or trade secret
RIV identification code
RIV/00216224:14310/17:00095252
Organization unit
Faculty of Science
ISBN
978-80-261-0754-5
Keywords (in Czech)
magnetrón; spoky; HiPIMS
Keywords in English
magnetron; spokes; HiPIMS
Tags
International impact
Changed: 11/12/2017 10:04, Mgr. Peter Klein, Ph.D.
Abstract
In the original language
The presented spoke study was performed in both non-reactive as well as reactive nitrogen HiPIMS plasma using simultaneous broadband optical screening via ICCD camera (200 ns time scale) and strip probes embedded into the niobium target. Strip probes measured actual local current delivered to the target. Spoke merging and splitting was detected by both employed methods.
Links
| ED2.1.00/03.0086, research and development project |
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| GA15-00863S, research and development project |
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| LO1411, research and development project |
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