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@proceedings{1398862,
author = {Fekete, Matej and Bernátová, Katarína and Klein, Peter and Hnilica, Jaroslav and Vašina, Petr},
booktitle = {Sixteenth International Conference on Reactive Sputter Deposition},
keywords = {R-HiPIMS; OES; titanium},
language = {eng},
isbn = {978-80-261-0754-5},
title = {Impact of Sputtered Species Ionization on Hysteresis Curve Shape – Model and Experiment},
year = {2017}
}
TY - CONF
ID - 1398862
AU - Fekete, Matej - Bernátová, Katarína - Klein, Peter - Hnilica, Jaroslav - Vašina, Petr
PY - 2017
TI - Impact of Sputtered Species Ionization on Hysteresis Curve Shape – Model and Experiment
SN - 9788026107545
KW - R-HiPIMS
KW - OES
KW - titanium
N2 - During the last decade the HiPIMS has shown great promise in the field of reactive thin film deposition. In the reactive HiPIMS (R-HiPIMS), the discharge power is delimited within short energetic pulses which, in addition to an enhanced ionization of the sputtered species, also leads to an enhanced dissociation of the reactive gas molecules resulting in an increasing gas reactivity with the surface, which is ultimately beneficial for the thin film formation.
ER -
FEKETE, Matej, Katarína BERNÁTOVÁ, Peter KLEIN, Jaroslav HNILICA a Petr VAŠINA. Impact of Sputtered Species Ionization on Hysteresis Curve Shape – Model and Experiment. In \textit{Sixteenth International Conference on Reactive Sputter Deposition}. 2017. ISBN~978-80-261-0754-5.
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