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@proceedings{1398867,
author = {Fekete, Matej and Bernátová, Katarína and Klein, Peter and Hnilica, Jaroslav and Vašina, Petr},
booktitle = {Potential Application of Plasma and Nanomaterials 2017},
keywords = {R-HiPIMS; OES; titanium},
language = {eng},
title = {Titanium Atom and Ion Number Density Evolution in Reactive HiPIMS},
year = {2017}
}
TY - CONF
ID - 1398867
AU - Fekete, Matej - Bernátová, Katarína - Klein, Peter - Hnilica, Jaroslav - Vašina, Petr
PY - 2017
TI - Titanium Atom and Ion Number Density Evolution in Reactive HiPIMS
KW - R-HiPIMS
KW - OES
KW - titanium
N2 - The shape of the hysteresis curve in R-HiPIMS was noticeable different from that one of dc magnetron sputtering operation at the same mean power – the transition from the metallic to compound mode and vice versa were shifted to lower reactive gas supply and the width of the hysteresis curve was reduced. These changes were more pronounced for R-HiPIMS processes with higher ionized fraction of the sputtered species. The modified Berg model assuming that a part of the sputtered and ionized species are back-attracted to the target was developed.
ER -
FEKETE, Matej, Katarína BERNÁTOVÁ, Peter KLEIN, Jaroslav HNILICA a Petr VAŠINA. Titanium Atom and Ion Number Density Evolution in Reactive HiPIMS. In \textit{Potential Application of Plasma and Nanomaterials 2017}. 2017.
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