Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN
Soft Magnetic Multilayers for GHz Applications

J 2017

Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications

FALUB, Claudiu Valentin, Rachid HIDA, Mojmír MEDUŇA, Josef ZWECK, Jean-Philippe MICHEL et. al.

Basic information

Original name

Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications

Name in Czech

Strukturní a feromagnetické vlastnosti naprašovaných měkkých magnetických multivrstev FeCoB/AlN pro GHz aplikace

Authors

FALUB, Claudiu Valentin (642 Romania), Rachid HIDA (756 Switzerland), Mojmír MEDUŇA (203 Czech Republic, guarantor, belonging to the institution), Josef ZWECK (756 Switzerland), Jean-Philippe MICHEL (756 Switzerland), Henri SIBUET (756 Switzerland), Daniel SCHNEIDER (756 Switzerland), Martin BLESS (756 Switzerland), Jan H. RICHTER (756 Switzerland) and Hartmut ROHRMANN (756 Switzerland)

Edition

IEEE TRANSACTIONS ON MAGNETICS, PISCATAWAY, IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2017, 0018-9464

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 1.467

RIV identification code

RIV/00216224:14310/17:00099306

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1109/TMAG.2017.2703175

UT WoS

000413981300039

Keywords (in Czech)

FeCoB; permeabilita vysoké high-frekvence; magnetické multivrstvy; magnetronové naprašování; měkké magnetické materiály

Keywords in English

FeCoB; high-frequency permeability; magnetic multilayers; magnetron sputtering; soft magnetic materials

Abstract

ORIG CZ

V originále

In this paper, we studied the structural and magnetic properties of amorphous FeCoB/AlN multilayered thin films with in-plane uniaxial magnetic anisotropy based on the Fe-28% Co-20% B (at. %) alloy, deposited on 8 '' Si/200 nm-thermal-SiO2 wafers in an industrial, high-throughput magnetron sputtering system.

In Czech

V tomto článku jsme studovali strukturní a magnetické vlastnosti amorfních tenkovrstvých vrstev FeCoB/AlN s rovinnou jednoosovou magnetickou anizotropií založenou na slitině Fe-28% Co-20% B, vypěstované na 8" Si/200 nm-termo-SiO2 deskách v průmyslovém, vysoce výkonném magnetronovém rozprašovacím systému.

Links

ED1.1.00/02.0068, research and development project

Name: CEITEC - central european institute of technology

LM2011020, research and development project

Name: CEITEC ? open access

Investor: Ministry of Education, Youth and Sports of the CR

LQ1601, research and development project

Name: CEITEC 2020 (Acronym: CEITEC2020)

Investor: Ministry of Education, Youth and Sports of the CR

Citovat

FALUB, Claudiu Valentin, Rachid HIDA, Mojmír MEDUŇA, Josef ZWECK, Jean-Philippe MICHEL, Henri SIBUET, Daniel SCHNEIDER, Martin BLESS, Jan H. RICHTER and Hartmut ROHRMANN. Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications. IEEE TRANSACTIONS ON MAGNETICS. PISCATAWAY: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2017, vol. 53, No 11, p. 2002906-2002911. ISSN 0018-9464. Available from: https://dx.doi.org/10.1109/TMAG.2017.2703175.

@article{1403090,
   author = {Falub, Claudiu Valentin and Hida, Rachid and Meduňa, Mojmír and Zweck, Josef and Michel, JeanandPhilippe and Sibuet, Henri and Schneider, Daniel and Bless, Martin and Richter, Jan H. and Rohrmann, Hartmut},
   article_location = {PISCATAWAY},
   article_number = {11},
   doi = {http://dx.doi.org/10.1109/TMAG.2017.2703175},
   keywords = {FeCoB; high-frequency permeability; magnetic multilayers; magnetron sputtering; soft magnetic materials},
   language = {eng},
   issn = {0018-9464},
   journal = {IEEE TRANSACTIONS ON MAGNETICS},
   title = {Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications},
   url = {http://ieeexplore.ieee.org/abstract/document/7924320/},
   volume = {53},
   year = {2017}
}

TY  - JOUR
ID  - 1403090
AU  - Falub, Claudiu Valentin - Hida, Rachid - Meduňa, Mojmír - Zweck, Josef - Michel, Jean-Philippe - Sibuet, Henri - Schneider, Daniel - Bless, Martin - Richter, Jan H. - Rohrmann, Hartmut
PY  - 2017
TI  - Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications
JF  - IEEE TRANSACTIONS ON MAGNETICS
VL  - 53
IS  - 11
SP  - 2002906
EP  - 2002906
PB  - IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
SN  - 00189464
KW  - FeCoB
KW  - high-frequency permeability
KW  - magnetic multilayers
KW  - magnetron sputtering
KW  - soft magnetic materials
UR  - http://ieeexplore.ieee.org/abstract/document/7924320/
L2  - http://ieeexplore.ieee.org/abstract/document/7924320/
N2  - In this paper, we studied the structural and magnetic properties of amorphous FeCoB/AlN multilayered thin films with in-plane uniaxial magnetic anisotropy based on the Fe-28% Co-20% B (at. %) alloy, deposited on 8 '' Si/200 nm-thermal-SiO2 wafers in an industrial, high-throughput magnetron sputtering system.
ER  -

FALUB, Claudiu Valentin, Rachid HIDA, Mojmír MEDUŇA, Josef ZWECK, Jean-Philippe MICHEL, Henri SIBUET, Daniel SCHNEIDER, Martin BLESS, Jan H. RICHTER and Hartmut ROHRMANN. Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications. \textit{IEEE TRANSACTIONS ON MAGNETICS}. PISCATAWAY: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2017, vol.~53, No~11, p.~2002906-2002911. ISSN~0018-9464. Available from: https://dx.doi.org/10.1109/TMAG.2017.2703175.

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