Effect of magnetic field on spoke behaviour in HiPIMS plasma

J 2018

Effect of magnetic field on spoke behaviour in HiPIMS plasma

HNILICA, Jaroslav, Peter KLEIN, Marta ŠLAPANSKÁ, Matej FEKETE, Petr VAŠINA et. al.

Základní údaje

Originální název

Effect of magnetic field on spoke behaviour in HiPIMS plasma

Autoři

HNILICA, Jaroslav (203 Česká republika, garant, domácí), Peter KLEIN (703 Slovensko, domácí), Marta ŠLAPANSKÁ (203 Česká republika, domácí), Matej FEKETE (703 Slovensko, domácí) a Petr VAŠINA (203 Česká republika, domácí)

Vydání

Journal of physics D: Applied physics, Bristol, England, IOP Publishing Ltd. 2018, 0022-3727

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 2.829

Kód RIV

RIV/00216224:14310/18:00100935

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1088/1361-6463/aaa7d3

UT WoS

000424898300002

Klíčová slova anglicky

magnetron sputtering; HiPIMS; spokes; plasma diagnostics

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 23. 4. 2024 11:18, Mgr. Michal Petr

Anotace

V originále

The objective of this paper is to study the effect of magnetic field strength on spoke behaviour in a high power impulse magnetron sputtering discharge. In three magnetic field configurations, a broad range of experimental conditions was investigated by high-speed camera imaging. The dual image feature of the employed camera enabled us to determine the shape and spoke mode number, as well as the velocity of the spokes. Five distinct spoke shapes were detected. For each magnetic field, a map was created relating the occurrence of the spoke shape with the discharge conditions. Similarly, the spoke mode number, as well as the spoke velocity, was found to be strongly dependent on the discharge conditions. Based on the optical emission results, it was proposed that the trailing edge of the triangular spoke is related to the production of secondary electrons created by argon ions on the spoke edges, while in the case of a round spoke shape, the secondary electrons are mainly created by multiple charged titanium ions in the centre of the spoke.

Návaznosti

GA15-00863S, projekt VaV

Název: Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace

Investor: Grantová agentura ČR, Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

HNILICA, Jaroslav, Peter KLEIN, Marta ŠLAPANSKÁ, Matej FEKETE a Petr VAŠINA. Effect of magnetic field on spoke behaviour in HiPIMS plasma. Journal of physics D: Applied physics. Bristol, England: IOP Publishing Ltd., 2018, roč. 51, č. 9, s. nestránkováno, 8 s. ISSN 0022-3727. Dostupné z: https://dx.doi.org/10.1088/1361-6463/aaa7d3.

@article{1417221,
   author = {Hnilica, Jaroslav and Klein, Peter and Šlapanská, Marta and Fekete, Matej and Vašina, Petr},
   article_location = {Bristol, England},
   article_number = {9},
   doi = {http://dx.doi.org/10.1088/1361-6463/aaa7d3},
   keywords = {magnetron sputtering; HiPIMS; spokes; plasma diagnostics},
   language = {eng},
   issn = {0022-3727},
   journal = {Journal of physics D: Applied physics},
   title = {Effect of magnetic field on spoke behaviour in HiPIMS plasma},
   url = {http://dx.doi.org/10.1088/1361-6463/aaa7d3},
   volume = {51},
   year = {2018}
}

TY  - JOUR
ID  - 1417221
AU  - Hnilica, Jaroslav - Klein, Peter - Šlapanská, Marta - Fekete, Matej - Vašina, Petr
PY  - 2018
TI  - Effect of magnetic field on spoke behaviour in HiPIMS plasma
JF  - Journal of physics D: Applied physics
VL  - 51
IS  - 9
SP  - nestránkováno
EP  - nestránkováno
PB  - IOP Publishing Ltd.
SN  - 00223727
KW  - magnetron sputtering
KW  - HiPIMS
KW  - spokes
KW  - plasma diagnostics
UR  - http://dx.doi.org/10.1088/1361-6463/aaa7d3
N2  - The objective of this paper is to study the effect of magnetic field strength on spoke behaviour in a high power impulse magnetron sputtering discharge. In three magnetic field configurations, a broad range of experimental conditions was investigated by high-speed camera imaging. The dual image feature of the employed camera enabled us to determine the shape and spoke mode number, as well as the velocity of the spokes. Five distinct spoke shapes were detected. For each magnetic field, a map was created relating the occurrence of the spoke shape with the discharge conditions. Similarly, the spoke mode number, as well as the spoke velocity, was found to be strongly dependent on the discharge conditions. Based on the optical emission results, it was proposed that the trailing edge of the triangular spoke is related to the production of secondary electrons created by argon ions on the spoke edges, while in the case of a round spoke shape, the secondary electrons are mainly created by multiple charged titanium ions in the centre of the spoke.
ER  -

HNILICA, Jaroslav, Peter KLEIN, Marta ŠLAPANSKÁ, Matej FEKETE a Petr VAŠINA. Effect of magnetic field on spoke behaviour in HiPIMS plasma. \textit{Journal of physics D: Applied physics}. Bristol, England: IOP Publishing Ltd., 2018, roč.~51, č.~9, s.~nestránkováno, 8 s. ISSN~0022-3727. Dostupné z: https://dx.doi.org/10.1088/1361-6463/aaa7d3.

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