Ellipsometry of Layered Systems

C 2018

Ellipsometry of Layered Systems

OHLÍDAL, Ivan, Jiří VOHÁNKA, Martin ČERMÁK a Daniel FRANTA

Základní údaje

Originální název

Ellipsometry of Layered Systems

Autoři

OHLÍDAL, Ivan (203 Česká republika, domácí), Jiří VOHÁNKA (203 Česká republika, domácí), Martin ČERMÁK (203 Česká republika, domácí) a Daniel FRANTA (203 Česká republika, domácí)

Vydání

Cham, Optical Characterization of Thin Solid Films, od s. 233-267, 35 s. Springer Series in Surface Sciences, volume 64, 2018

Nakladatel

Springer

Další údaje

Jazyk

angličtina

Typ výsledku

Kapitola resp. kapitoly v odborné knize

Obor

10306 Optics

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Forma vydání

tištěná verze "print"

Odkazy

odkaz na stránku nakladatele

Kód RIV

RIV/00216224:14310/18:00104686

Organizační jednotka

Přírodovědecká fakulta

ISBN

978-3-319-75324-9

DOI

http://dx.doi.org/10.1007/978-3-319-75325-6_9

UT WoS

000441388800011

Klíčová slova anglicky

Layered systems;Jones formalism;Stokes–Mueller formalism;Yeh formalism;Ellipsometry;Ellipsometric techniques

Štítky

topvydavatel

Změněno: 28. 11. 2018 15:17, Mgr. Jiří Vohánka, Ph.D.

Anotace

V originále

In this chapter the theoretical aspects of ellipsometry and their applications in optics of layered systems are presented. The basic formulae of the theory of ellipsometric measurements are introduced. For this purpose the Jones and Stokes--Mueller matrix formalisms are used. By using these formalisms the individual types of ellipsometry and the most utilized ellipsometric techniques are briefly described. Furthermore, the matrix formalisms enabling us to derive the formulae for the optical quantities of optically isotropic and anisotropic layered systems are described as well. Applications of the matrix formalisms in practice are illustrated by means of three examples.

Návaznosti

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

OHLÍDAL, Ivan, Jiří VOHÁNKA, Martin ČERMÁK a Daniel FRANTA. Ellipsometry of Layered Systems. In Olaf Stenzel, Miloslav Ohlídal. Optical Characterization of Thin Solid Films. Cham: Springer, 2018, s. 233-267. Springer Series in Surface Sciences, volume 64. ISBN 978-3-319-75324-9. Dostupné z: https://dx.doi.org/10.1007/978-3-319-75325-6_9.

@inbook{1472962,
   author = {Ohlídal, Ivan and Vohánka, Jiří and Čermák, Martin and Franta, Daniel},
   address = {Cham},
   booktitle = {Optical Characterization of Thin Solid Films},
   doi = {http://dx.doi.org/10.1007/978-3-319-75325-6_9},
   editor = {Olaf Stenzel, Miloslav Ohlídal},
   keywords = {Layered systems;Jones formalism;Stokes–Mueller formalism;Yeh formalism;Ellipsometry;Ellipsometric techniques},
   howpublished = {tištěná verze "print"},
   language = {eng},
   location = {Cham},
   isbn = {978-3-319-75324-9},
   pages = {233-267},
   publisher = {Springer},
   title = {Ellipsometry of Layered Systems},
   url = {https://link.springer.com/chapter/10.1007/978-3-319-75325-6_9},
   year = {2018}
}

TY  - CHAP
ID  - 1472962
AU  - Ohlídal, Ivan - Vohánka, Jiří - Čermák, Martin - Franta, Daniel
PY  - 2018
TI  - Ellipsometry of Layered Systems
VL  - Springer Series in Surface Sciences, volume 64
PB  - Springer
CY  - Cham
SN  - 9783319753249
KW  - Layered systems;Jones formalism;Stokes–Mueller formalism;Yeh formalism;Ellipsometry;Ellipsometric techniques
UR  - https://link.springer.com/chapter/10.1007/978-3-319-75325-6_9
L2  - https://link.springer.com/chapter/10.1007/978-3-319-75325-6_9
N2  - In this chapter the theoretical aspects of ellipsometry and their applications in optics of layered systems are presented. The basic formulae of the theory of ellipsometric measurements are introduced. For this purpose the Jones and Stokes--Mueller matrix formalisms are used. By using these formalisms the individual types of ellipsometry and the most utilized ellipsometric techniques are briefly described. Furthermore, the matrix formalisms enabling us to derive the formulae for the optical quantities of optically isotropic and anisotropic layered systems are described as well. Applications of the matrix formalisms in practice are illustrated by means of three examples.
ER  -

OHLÍDAL, Ivan, Jiří VOHÁNKA, Martin ČERMÁK a Daniel FRANTA. Ellipsometry of Layered Systems. In Olaf Stenzel, Miloslav Ohlídal. \textit{Optical Characterization of Thin Solid Films}. Cham: Springer, 2018, s.~233-267. Springer Series in Surface Sciences, volume 64. ISBN~978-3-319-75324-9. Dostupné z: https://dx.doi.org/10.1007/978-3-319-75325-6\_{}9.

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