Optical Characterization of Thin Films Exhibiting Defects

C 2018

Optical Characterization of Thin Films Exhibiting Defects

OHLÍDAL, Ivan, Martin ČERMÁK a Jiří VOHÁNKA

Základní údaje

Originální název

Optical Characterization of Thin Films Exhibiting Defects

Autoři

OHLÍDAL, Ivan (203 Česká republika, domácí), Martin ČERMÁK (203 Česká republika, domácí) a Jiří VOHÁNKA (203 Česká republika, domácí)

Vydání

Cham, Optical Characterization of Thin Solid Films, od s. 271-313, 43 s. Springer Series in Surface Sciences, volume 64, 2018

Nakladatel

Springer

Další údaje

Jazyk

angličtina

Typ výsledku

Kapitola resp. kapitoly v odborné knize

Obor

10306 Optics

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Forma vydání

tištěná verze "print"

Odkazy

odkaz na stránku nakladatele

Kód RIV

RIV/00216224:14310/18:00104687

Organizační jednotka

Přírodovědecká fakulta

ISBN

978-3-319-75324-9

DOI

http://dx.doi.org/10.1007/978-3-319-75325-6_10

UT WoS

000441388800012

Klíčová slova anglicky

Thin film defects;Boundary roughness;Thickness non-uniformity;Optical inhomogeneity;Overlayers;Transition-layers

Štítky

topvydavatel

Změněno: 28. 11. 2018 15:24, Mgr. Jiří Vohánka, Ph.D.

Anotace

V originále

In this chapter the influence of the main defects on the optical characterization of thin films is described. These defects are random roughness of boundaries, thickness non-uniformity, optical inhomogeneity corresponding to refractive index profiles, overlayers and transition layers. The theoretical approaches and the formulae for the corresponding optical quantities of the thin films exhibiting these defects are presented. The attention is concentrated on the ellipsometric parameters and reflectance of these thin films belonging to the specular reflection. The selected numerical examples illustrating the influence of the defects are introduced. Several experimental examples of the optical characterization of the thin films with the defects are also shown. The discussion of both the numerical and experimental results is carried out too.

Návaznosti

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

OHLÍDAL, Ivan, Martin ČERMÁK a Jiří VOHÁNKA. Optical Characterization of Thin Films Exhibiting Defects. In Olaf Stenzel, Miloslav Ohlídal. Optical Characterization of Thin Solid Films. Cham: Springer, 2018, s. 271-313. Springer Series in Surface Sciences, volume 64. ISBN 978-3-319-75324-9. Dostupné z: https://dx.doi.org/10.1007/978-3-319-75325-6_10.

@inbook{1472963,
   author = {Ohlídal, Ivan and Čermák, Martin and Vohánka, Jiří},
   address = {Cham},
   booktitle = {Optical Characterization of Thin Solid Films},
   doi = {http://dx.doi.org/10.1007/978-3-319-75325-6_10},
   editor = {Olaf Stenzel, Miloslav Ohlídal},
   keywords = {Thin film defects;Boundary roughness;Thickness non-uniformity;Optical inhomogeneity;Overlayers;Transition-layers},
   howpublished = {tištěná verze "print"},
   language = {eng},
   location = {Cham},
   isbn = {978-3-319-75324-9},
   pages = {271-313},
   publisher = {Springer},
   title = {Optical Characterization of Thin Films Exhibiting Defects},
   url = {https://link.springer.com/chapter/10.1007/978-3-319-75325-6_10},
   year = {2018}
}

TY  - CHAP
ID  - 1472963
AU  - Ohlídal, Ivan - Čermák, Martin - Vohánka, Jiří
PY  - 2018
TI  - Optical Characterization of Thin Films Exhibiting Defects
VL  - Springer Series in Surface Sciences, volume 64
PB  - Springer
CY  - Cham
SN  - 9783319753249
KW  - Thin film defects;Boundary roughness;Thickness non-uniformity;Optical inhomogeneity;Overlayers;Transition-layers
UR  - https://link.springer.com/chapter/10.1007/978-3-319-75325-6_10
L2  - https://link.springer.com/chapter/10.1007/978-3-319-75325-6_10
N2  - In this chapter the influence of the main defects on the optical characterization of thin films is described. These defects are random roughness of boundaries, thickness non-uniformity, optical inhomogeneity corresponding to refractive index profiles, overlayers and transition layers. The theoretical approaches and the formulae for the corresponding optical quantities of the thin films exhibiting these defects are presented. The attention is concentrated on the ellipsometric parameters and reflectance of these thin films belonging to the specular reflection. The selected numerical examples illustrating the influence of the defects are introduced. Several experimental examples of the optical characterization of the thin films with the defects are also shown. The discussion of both the numerical and experimental results is carried out too.
ER  -

OHLÍDAL, Ivan, Martin ČERMÁK a Jiří VOHÁNKA. Optical Characterization of Thin Films Exhibiting Defects. In Olaf Stenzel, Miloslav Ohlídal. \textit{Optical Characterization of Thin Solid Films}. Cham: Springer, 2018, s.~271-313. Springer Series in Surface Sciences, volume 64. ISBN~978-3-319-75324-9. Dostupné z: https://dx.doi.org/10.1007/978-3-319-75325-6\_{}10.

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