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@proceedings{1484554,
author = {Britun, Nikolay and Hnilica, Jaroslav and Snyders, Rony},
booktitle = {International Workshop: PLASMA DIAGNOSTICS AND MODELLING},
keywords = {magnetron sputtering; deposition process; LIF},
language = {eng},
title = {Optical spectroscopy as a tool for visualization of sputtering plasma dynamics},
year = {2018}
}
TY - CONF
ID - 1484554
AU - Britun, Nikolay - Hnilica, Jaroslav - Snyders, Rony
PY - 2018
TI - Optical spectroscopy as a tool for visualization of sputtering plasma dynamics
KW - magnetron sputtering
KW - deposition process
KW - LIF
N2 - This work combines various optical diagnostic methods for in-situ characterization of high-power impulse magnetron sputtering (HiPIMS) process. Special attention is devoted to two-dimensional visualization of the ground state sputtered atoms in the discharge volume. Laser-induced fluorescence and optical absorption spectroscopy represent two main diagnostic techniques which have been combined for the discharge diagnostics. As a result of discharge characterization the number densities as well as the particularities of propagation of the neutral and ionized sputtered Ti atoms were significantly clarified. The effects of HiPIMS plasma-on and plasma-off time duration on the Ti ionization as well as on the general evolution of density distribution in the discharge volume have been studied, demonstrating the importance of plasma pulse duration as well as the pulse energy for controlling the discharge properties.
ER -
BRITUN, Nikolay, Jaroslav HNILICA a Rony SNYDERS. Optical spectroscopy as a tool for visualization of sputtering plasma dynamics. In \textit{International Workshop: PLASMA DIAGNOSTICS AND MODELLING}. 2018.
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