J 2019

X-ray diffraction on stacking faults in 3C-SiC epitaxial microcrystals grown on patterned Si(0 0 1) wafers

MEDUŇA, Mojmír; Thomas KREILIGER; Marco MAUCERI; Marco PUGLISI; Fulvio MANCARELLA et. al.

Basic information

Original name

X-ray diffraction on stacking faults in 3C-SiC epitaxial microcrystals grown on patterned Si(0 0 1) wafers

Name in Czech

Rtg difrakce na vrstevných chybách v 3C-SiC epitaxních mikrokrystalech rostlých na vzorkovaných Si(001) deskách

Authors

MEDUŇA, Mojmír (203 Czech Republic, guarantor, belonging to the institution); Thomas KREILIGER (756 Switzerland); Marco MAUCERI (380 Italy); Marco PUGLISI (380 Italy); Fulvio MANCARELLA (380 Italy); Francesco LA VIA (380 Italy); Danilo CRIPPA (380 Italy); Leo MIGLIO (380 Italy) and Hans VON KÄNEL (756 Switzerland)

Edition

Journal of Crystal Growth, Amsterdam, Elsevier, 2019, 0022-0248

Other information

Language

English

Type of outcome

Article in a journal

Field of Study

10302 Condensed matter physics

Country of publisher

Netherlands

Confidentiality degree

is not subject to a state or trade secret

References:

Impact factor

Impact factor: 1.632

RIV identification code

RIV/00216224:14310/19:00108995

Organization unit

Faculty of Science

UT WoS

000455667500011

EID Scopus

2-s2.0-85056217589

Keywords in English

Semiconducting silicon compounds; Carbides; High resolution X-ray diffraction; Planar defects; Low dimensional structures

Tags

Tags

International impact, Reviewed
Changed: 13/3/2020 10:58, Mgr. Marie Novosadová Šípková, DiS.

Abstract

In the original language

We present an investigation of the structural quality of arrays of 3C-SiC micropillars and microridges grown epitaxially on deeply etched Si(0 0 1) substrates offcut towards [1 1 0].

In Czech

Představujeme zkoumání strukturální kvality polí 3C-SiC mikropilířů a mikrodrátů pěstovaných epitaxně na hluboce leptaných substrátech Si (0 0 1) odříznutých vzhledem k [1 1 0].

Links

LM2015041, research and development project
Name: CEITEC Nano
Investor: Ministry of Education, Youth and Sports of the CR
LQ1601, research and development project
Name: CEITEC 2020 (Acronym: CEITEC2020)
Investor: Ministry of Education, Youth and Sports of the CR