Statistical examination of spoke evolution in HiPIMS

k 2019

Statistical examination of spoke evolution in HiPIMS

KLEIN, Peter, Jaroslav HNILICA, Bradley JAMES W. a Petr VAŠINA

Základní údaje

Originální název

Statistical examination of spoke evolution in HiPIMS

Autoři

KLEIN, Peter (703 Slovensko, domácí), Jaroslav HNILICA (203 Česká republika, domácí), Bradley JAMES W. (826 Velká Británie a Severní Irsko) a Petr VAŠINA (203 Česká republika, garant, domácí)

Vydání

2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), 2019

Další údaje

Jazyk

angličtina

Typ výsledku

Prezentace na konferencích

Obor

10301 Atomic, molecular and chemical physics

Stát vydavatele

Česká republika

Utajení

není předmětem státního či obchodního tajemství

Kód RIV

RIV/00216224:14310/19:00110082

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova česky

magnetrón; spoke; HiPIMS

Klíčová slova anglicky

magnetron; spoke; HiPIMS

Příznaky

Mezinárodní význam

Změněno: 4. 7. 2019 11:07, Mgr. Peter Klein, Ph.D.

Anotace

V originále

Plasma in high-power impulse magnetron sputtering (HiPIMS) discharge, similarly to other discharges utilizing ExB field (Hall thrusters, homopolar devices), undergoes self-organization into the ionization zones rotating in the ExB direction, called spokes. In different experimental conditions the appearance, number and rotational velocity of spokes change. Additionally, the spokes were observed to split and merge over time even when discharge parameters were kept constant. A study is presented where a novel diagnostic method of strip probes together with well-established fast camera screening were utilized in order to track spokes during the whole stable high-current phase of the HiPIMS pulse. Strip probes embedded to the target locally capture the current flow over the whole pulse, while the fast camera captures a plasma emission from the whole target at a given time. Such combination allows observing events such as spoke merging and splitting in more detail. It was found that spoke merging and splitting events effect neighboring spokes. Additionally, when spokes split or merged overall charge supplied through the spokes was conserved. Statistical examination of measured data revealed two distinct tendencies of the spoke configuration. At the low pressure, spokes merged and split over time seemingly in a random fashion around a stable configuration, while in higher pressure spoke splitting was strongly favored over the merging process. Therefore, at higher pressure number of spokes was observed to increase in time despite the discharge current and cathode voltage were kept constant. Based on experimental results, a phenomenological model based on the metal resputtering was created in order to explain merging and splitting events.

Návaznosti

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

KLEIN, Peter, Jaroslav HNILICA, Bradley JAMES W. a Petr VAŠINA. Statistical examination of spoke evolution in HiPIMS. In 2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019). 2019.

@proceedings{1544222,
   author = {Klein, Peter and Hnilica, Jaroslav and James W., Bradley and Vašina, Petr},
   booktitle = {2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019)},
   keywords = {magnetron; spoke; HiPIMS},
   language = {eng},
   title = {Statistical examination of spoke evolution in HiPIMS},
   year = {2019}
}

TY  - CONF
ID  - 1544222
AU  - Klein, Peter - Hnilica, Jaroslav - James W., Bradley - Vašina, Petr
PY  - 2019
TI  - Statistical examination of spoke evolution in HiPIMS
KW  - magnetron
KW  - spoke
KW  - HiPIMS
N2  - Plasma in high-power impulse magnetron sputtering (HiPIMS) discharge, similarly to other discharges utilizing ExB field (Hall thrusters, homopolar devices), undergoes self-organization into the ionization zones rotating in the ExB direction, called spokes. In different experimental conditions the appearance, number and rotational velocity of spokes change. Additionally, the spokes were observed to split and merge over time even when discharge parameters were kept constant. A study is presented where a novel diagnostic method of strip probes together with well-established fast camera screening were utilized in order to track spokes during the whole stable high-current phase of the HiPIMS pulse. Strip probes embedded to the target locally capture the current flow over the whole pulse, while the fast camera captures a plasma emission from the whole target at a given time. Such combination allows observing events such as spoke merging and splitting in more detail. It was found that spoke merging and splitting events effect neighboring spokes. Additionally, when spokes split or merged overall charge supplied through the spokes was conserved. Statistical examination of measured data revealed two distinct tendencies of the spoke configuration. At the low pressure, spokes merged and split over time seemingly in a random fashion around a stable configuration, while in higher pressure spoke splitting was strongly favored over the merging process. Therefore, at higher pressure number of spokes was observed to increase in time despite the discharge current and cathode voltage were kept constant. Based on experimental results, a phenomenological model based on the metal resputtering was created in order to explain merging and splitting events.
ER  -

KLEIN, Peter, Jaroslav HNILICA, Bradley JAMES W. a Petr VAŠINA. Statistical examination of spoke evolution in HiPIMS. In \textit{2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019)}. 2019.

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