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@proceedings{1545267,
author = {Hnilica, Jaroslav and Klein, Peter and Šlapanská, Marta and Bradley, James and Vašina, Petr},
booktitle = {THE 15th INTERNATIONAL SYMPOSIUM ON SPUTTERING & PLASMA PROCESSES},
keywords = {magnetron sputtering; HiPIMS; spokes; fast camera; strip probe},
language = {eng},
title = {Fast camera imaging and strip probe measurements of spokes in HiPIMS plasma},
url = {https://issp2019.org/index.html},
year = {2019}
}
TY - CONF
ID - 1545267
AU - Hnilica, Jaroslav - Klein, Peter - Šlapanská, Marta - Bradley, James - Vašina, Petr
PY - 2019
TI - Fast camera imaging and strip probe measurements of spokes in HiPIMS plasma
KW - magnetron sputtering
KW - HiPIMS
KW - spokes
KW - fast camera
KW - strip probe
UR - https://issp2019.org/index.html
L2 - https://issp2019.org/index.html
N2 - The simultaneous measurements using three strip probes flush-mounted into the segmented target together with the fast camera optical imaging are presented. 2D reconstruction of the spokes from current measured by the strip probes is compared to the broadband plasma emission image. Additionally, the dual diagnostic system allows the merging of a set of spokes to be studied as they rotate.
ER -
HNILICA, Jaroslav, Peter KLEIN, Marta ŠLAPANSKÁ, James BRADLEY a Petr VAŠINA. Fast camera imaging and strip probe measurements of spokes in HiPIMS plasma. In \textit{THE 15th INTERNATIONAL SYMPOSIUM ON SPUTTERING \&{} PLASMA PROCESSES}. 2019. ISSN~2434-9674.
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