Optical characterization of inhomogeneous thin films containing
transition layers using the combined method of spectroscopic
ellipsometry and spectroscopic reflectometry based on
multiple-beam interference model

J 2019

Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model

OHLÍDAL, Ivan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ, Jaroslav ŽENÍŠEK, Petr VAŠINA et. al.

Základní údaje

Originální název

Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model

Autoři

OHLÍDAL, Ivan (203 Česká republika, domácí), Jiří VOHÁNKA (203 Česká republika, domácí), Vilma BURŠÍKOVÁ (203 Česká republika, domácí), Jaroslav ŽENÍŠEK (203 Česká republika, domácí), Petr VAŠINA (203 Česká republika, domácí), Martin ČERMÁK (203 Česká republika, domácí) a Daniel FRANTA (203 Česká republika, domácí)

Vydání

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 2019, 2166-2746

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10306 Optics

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 1.511

Kód RIV

RIV/00216224:14310/19:00107920

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1116/1.5122014

UT WoS

000522021700072

Klíčová slova anglicky

Optical constants;Optical absorption;Reflectometry;Magnetron sputtering;Optical metrology;Thin films;Chemical vapor deposition;Optical properties

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 17. 4. 2020 17:19, Mgr. Marie Šípková, DiS.

Anotace

V originále

This paper presents the results of the optical characterization of inhomogeneous thin films of polymer-like SiOxCyHz and non-stoichiometric silicon nitride SiNx. An efficient method combining variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied at the near-normal incidence based on the multiple-beam interference model is utilized for this optical characterization. The multiple-beam interference model allows us to quickly evaluate the values of ellipsometric parameters and reflectance of the inhomogeneous thin films, which exhibit general profiles of their optical constants. The spectral dependencies of the optical constants of the inhomogeneous SiOxCyHz and SiNx thin films are determined using the Campi–Coriasso dispersion model. The profiles of the optical constants of these films can also be determined. Furthermore, the transition layers at the lower boundaries of the characterized films are also taken into account. Spectral dependencies of the optical constants of these transition layers are also determined using the Campi–Coriasso dispersion model.

Návaznosti

GA19-15240S, projekt VaV

Název: Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

Investor: Grantová agentura ČR, Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

OHLÍDAL, Ivan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ, Jaroslav ŽENÍŠEK, Petr VAŠINA, Martin ČERMÁK a Daniel FRANTA. Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 2019, roč. 37, č. 6, s. "062921-1"-"062921-10", 10 s. ISSN 2166-2746. Dostupné z: https://dx.doi.org/10.1116/1.5122014.

@article{1598865,
   author = {Ohlídal, Ivan and Vohánka, Jiří and Buršíková, Vilma and Ženíšek, Jaroslav and Vašina, Petr and Čermák, Martin and Franta, Daniel},
   article_number = {6},
   doi = {http://dx.doi.org/10.1116/1.5122014},
   keywords = {Optical constants;Optical absorption;Reflectometry;Magnetron sputtering;Optical metrology;Thin films;Chemical vapor deposition;Optical properties},
   language = {eng},
   issn = {2166-2746},
   journal = {Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics},
   title = {Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model},
   url = {https://doi.org/10.1116/1.5122014},
   volume = {37},
   year = {2019}
}

TY  - JOUR
ID  - 1598865
AU  - Ohlídal, Ivan - Vohánka, Jiří - Buršíková, Vilma - Ženíšek, Jaroslav - Vašina, Petr - Čermák, Martin - Franta, Daniel
PY  - 2019
TI  - Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model
JF  - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
VL  - 37
IS  - 6
SP  - "062921-1"-"062921-10"
EP  - "062921-1"-"062921-10"
SN  - 21662746
KW  - Optical constants;Optical absorption;Reflectometry;Magnetron sputtering;Optical metrology;Thin films;Chemical vapor deposition;Optical properties
UR  - https://doi.org/10.1116/1.5122014
L2  - https://doi.org/10.1116/1.5122014
N2  - This paper presents the results of the optical characterization of inhomogeneous thin films of polymer-like SiOxCyHz and non-stoichiometric silicon nitride SiNx. An efficient method combining variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied at the near-normal incidence based on the multiple-beam interference model is utilized for this optical characterization. The multiple-beam interference model allows us to quickly evaluate the values of ellipsometric parameters and reflectance of the inhomogeneous thin films, which exhibit general profiles of their optical constants. The spectral dependencies of the optical constants of the inhomogeneous SiOxCyHz and SiNx thin films are determined using the Campi–Coriasso dispersion model. The profiles of the optical constants of these films can also be determined. Furthermore, the transition layers at the lower boundaries of the characterized films are also taken into account. Spectral dependencies of the optical constants of these transition layers are also determined using the Campi–Coriasso dispersion model.
ER  -

OHLÍDAL, Ivan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ, Jaroslav ŽENÍŠEK, Petr VAŠINA, Martin ČERMÁK a Daniel FRANTA. Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model. \textit{Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics}. 2019, roč.~37, č.~6, s.~''062921-1''-''062921-10'', 10 s. ISSN~2166-2746. Dostupné z: https://dx.doi.org/10.1116/1.5122014.

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