Correlating structural and mechanical properties of AlN/TiN
superlattice films

J 2019

Correlating structural and mechanical properties of AlN/TiN superlattice films

KOUTNÁ, Nikola, Petr ŘEHÁK, Zhuo CHEN, Matthias BARTOSIK, Markus FALLMANN et. al.

Základní údaje

Originální název

Correlating structural and mechanical properties of AlN/TiN superlattice films

Autoři

KOUTNÁ, Nikola (203 Česká republika, garant, domácí), Petr ŘEHÁK (203 Česká republika), Zhuo CHEN, Matthias BARTOSIK, Markus FALLMANN, Miroslav CERNY, Zaoli ZHANG, Martin FRIÁK (203 Česká republika, domácí), Mojmír ŠOB (203 Česká republika, domácí), Paul H. MAYRHOFER a David HOLEC (203 Česká republika)

Vydání

Scripta Materialia, Oxford, Pergamon-Elsevier Science Ltd. 2019, 1359-6462

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10403 Physical chemistry

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

Full Text

Impakt faktor

Impact factor: 5.079

Kód RIV

RIV/00216224:14310/19:00112862

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1016/j.scriptamat.2019.02.021

UT WoS

000463127300033

Klíčová slova anglicky

Superlattice; Ab initio; TEM; Elasticity cleavage

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 23. 3. 2020 09:36, Mgr. Marie Šípková, DiS.

Anotace

V originále

Combining first-principles and experimental techniques, we establish Young's modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice-providing indications regarding crack initiation processes-is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses. (C) 2019 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

Návaznosti

LQ1601, projekt VaV

Název: CEITEC 2020 (Akronym: CEITEC2020)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, CEITEC 2020

Citovat

KOUTNÁ, Nikola, Petr ŘEHÁK, Zhuo CHEN, Matthias BARTOSIK, Markus FALLMANN, Miroslav CERNY, Zaoli ZHANG, Martin FRIÁK, Mojmír ŠOB, Paul H. MAYRHOFER a David HOLEC. Correlating structural and mechanical properties of AlN/TiN superlattice films. Scripta Materialia. Oxford: Pergamon-Elsevier Science Ltd., 2019, roč. 165, MAY 2019, s. 159-163. ISSN 1359-6462. Dostupné z: https://dx.doi.org/10.1016/j.scriptamat.2019.02.021.

@article{1616017,
   author = {Koutná, Nikola and Řehák, Petr and Chen, Zhuo and Bartosik, Matthias and Fallmann, Markus and Cerny, Miroslav and Zhang, Zaoli and Friák, Martin and Šob, Mojmír and Mayrhofer, Paul H. and Holec, David},
   article_location = {Oxford},
   article_number = {MAY 2019},
   doi = {http://dx.doi.org/10.1016/j.scriptamat.2019.02.021},
   keywords = {Superlattice; Ab initio; TEM; Elasticity cleavage},
   language = {eng},
   issn = {1359-6462},
   journal = {Scripta Materialia},
   title = {Correlating structural and mechanical properties of AlN/TiN superlattice films},
   url = {https://www.sciencedirect.com/science/article/pii/S1359646219301046},
   volume = {165},
   year = {2019}
}

TY  - JOUR
ID  - 1616017
AU  - Koutná, Nikola - Řehák, Petr - Chen, Zhuo - Bartosik, Matthias - Fallmann, Markus - Cerny, Miroslav - Zhang, Zaoli - Friák, Martin - Šob, Mojmír - Mayrhofer, Paul H. - Holec, David
PY  - 2019
TI  - Correlating structural and mechanical properties of AlN/TiN superlattice films
JF  - Scripta Materialia
VL  - 165
IS  - MAY 2019
SP  - 159-163
EP  - 159-163
PB  - Pergamon-Elsevier Science Ltd.
SN  - 13596462
KW  - Superlattice
KW  - Ab initio
KW  - TEM
KW  - Elasticity cleavage
UR  - https://www.sciencedirect.com/science/article/pii/S1359646219301046
L2  - https://www.sciencedirect.com/science/article/pii/S1359646219301046
N2  - Combining first-principles and experimental techniques, we establish Young's modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice-providing indications regarding crack initiation processes-is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses. (C) 2019 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
ER  -

KOUTNÁ, Nikola, Petr ŘEHÁK, Zhuo CHEN, Matthias BARTOSIK, Markus FALLMANN, Miroslav CERNY, Zaoli ZHANG, Martin FRIÁK, Mojmír ŠOB, Paul H. MAYRHOFER a David HOLEC. Correlating structural and mechanical properties of AlN/TiN superlattice films. \textit{Scripta Materialia}. Oxford: Pergamon-Elsevier Science Ltd., 2019, roč.~165, MAY 2019, s.~159-163. ISSN~1359-6462. Dostupné z: https://dx.doi.org/10.1016/j.scriptamat.2019.02.021.

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