2020
Behaviour of spokes in reactive HiPIMS
KLEIN, Peter, Jaroslav HNILICA, Matej FEKETE, Marta ŠLAPANSKÁ, Petr VAŠINA et. al.Základní údaje
Originální název
Behaviour of spokes in reactive HiPIMS
Autoři
Vydání
Workshop on Plasma-Based Synthesis of Nanomaterials, 2020
Další údaje
Jazyk
angličtina
Typ výsledku
Konferenční abstrakt
Obor
10305 Fluids and plasma physics
Stát vydavatele
Česká republika
Utajení
není předmětem státního či obchodního tajemství
Organizační jednotka
Přírodovědecká fakulta
Klíčová slova česky
HiPIMS; Spoke; Reaktivní Naprašování
Klíčová slova anglicky
HiPIMS; Spoke; Reactive sputtering
Příznaky
Mezinárodní význam
Změněno: 29. 4. 2021 19:00, Mgr. Marie Šípková, DiS.
Anotace
V originále
Plasma in high-power impulse magnetron sputtering (HiPIMS) discharge, similarly to other discharges utilizing ExB field (Hall thrusters, homopolar devices), undergoes self-organization into the ionization zones rotating in the ExB direction, called spokes [1]. Many studies were conducted focusing on the characterization of their appearance, number, rotational velocity, merging and splitting events in different experimental conditions. Nevertheless, only very little research was conducted in the case of reactive sputtering, where only general spoke characteristics were evaluated [2]. A dual-image fast camera screening was utilized to capture plasma emission on 3” Nb target in a reactive mixture of nitrogen and argon. Spoke characteristics were evaluated while overall pressure and supplied power was kept constant and the ratio of N2/Ar was varied. The shape, velocity and spoke number were significantly affected by higher ratio of N2 in the mixture. To distinguish between the effects of the poisoned target and reactive gas present in the plasma on spokes, plasma emission was screened as the Nb target was cleaned in pure Ar atmosphere. Additionally, obtained spoke characteristics were compared to those made on a fully compound NbN target
Návaznosti
| GA19-00579S, projekt VaV |
| ||
| LM2018097, projekt VaV |
|