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@inproceedings{1625872,
author = {Křenek, Tomáš and Mikysek, Petr and Pola, Michal and Vála, Lukáš and Melaré, Estela and Jandová, Věra and Vavruňková, Veronika and Rieger, David},
address = {UK},
booktitle = {IOP Conference Series: Materials Science and Engineering},
doi = {http://dx.doi.org/10.1088/1757-899X/613/1/012016},
edition = {613},
keywords = {pulsed laser deposition; zirconium oxides; FTIR spectroscopy; Zr-O films; X-ray diffraction},
howpublished = {tištěná verze "print"},
language = {eng},
location = {UK},
pages = {1-7},
publisher = {IOP},
title = {Formation of metastable zirconium oxides using pulsed laser deposition of ZrO based target},
url = {https://iopscience.iop.org/article/10.1088/1757-899X/613/1/012016},
year = {2019}
}
TY - JOUR
ID - 1625872
AU - Křenek, Tomáš - Mikysek, Petr - Pola, Michal - Vála, Lukáš - Melaré, Estela - Jandová, Věra - Vavruňková, Veronika - Rieger, David
PY - 2019
TI - Formation of metastable zirconium oxides using pulsed laser deposition of ZrO based target
PB - IOP
CY - UK
KW - pulsed laser deposition
KW - zirconium oxides
KW - FTIR spectroscopy
KW - Zr-O films
KW - X-ray diffraction
UR - https://iopscience.iop.org/article/10.1088/1757-899X/613/1/012016
L2 - https://iopscience.iop.org/article/10.1088/1757-899X/613/1/012016
N2 - There is a growing interest about the possibilities for preparation of various zirconium oxides from scientific as well as application point of view. Laser ablation of solid target consisting of sintered grains of metallic hexagonal Zr3O and monoclinic ZrO2 results in evaporation of Zr, O species (ions, atoms) and subsequent deposition of Zr-O film. Ta and Cu have been used as substrates. The films were analyzed by SEM-EDX, Raman and FTIR spectroscopy and X-ray diffraction. The coat on Cu consists of monoclinic ZrO2, rhombohedric Zr3O, and metastable tetragonal ZrO2 phase.
ER -
KŘENEK, Tomáš, Petr MIKYSEK, Michal POLA, Lukáš VÁLA, Estela MELARÉ, Věra JANDOVÁ, Veronika VAVRUŇKOVÁ a David RIEGER. Formation of metastable zirconium oxides using pulsed laser deposition of ZrO based target. In \textit{IOP Conference Series: Materials Science and Engineering}. 613. vyd. UK: IOP, 2019, s.~1-7. ISSN~1757-8981. Dostupné z: https://dx.doi.org/10.1088/1757-899X/613/1/012016.
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